SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2026-2029

Direct imprinting on a polycarbonate substrate with a compressed air press for polarizer applications

(4) Lin, Chun Hung a Lin, Hsi Ho a Chen, Wen Yu a Cheng, Tsung Chieh b

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

b NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES (Taiwan)

Author keywords

Compressed air press; Flexible substrate; Nanoimprint; Polycarbonate; Wire grid polarizer

Indexed keywords

APPLIED PRESSURE; FLEXIBLE SUBSTRATE; IMPRINTED POLYMERS; INFRARED REGIONS; NANO-IMPRINT; POLYCARBONATE SHEETS; POLYCARBONATE SUBSTRATES; POTENTIAL APPLICATIONS; RIGOROUS COUPLED WAVE ANALYSIS; SILICON MOLDS; TWO-STEP PROCESS; WIRE GRID POLARIZERS;

COLD STORAGE; COMPRESSED AIR; FABRICATION; OPTICAL INSTRUMENTS; PRESSES (MACHINE TOOLS); PRESSURE VESSELS; WIRE;

PNEUMATICS;

EID: 79952178089 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2010.12.089 Document Type: Conference Paper

Times cited : (7)

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