Computer simulation of the topography evolution on ion bombarded surfaces

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 202, Issue , 2003, Pages 182-187

  Zier, M ^a,b   Hauffe, W ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b Leibniz Inst F Fest korper /W   (Germany)

Author keywords

Facets; Ion beam; Roughness; Simulation

Indexed keywords

COMPUTER SIMULATION; ION BEAMS; ION BOMBARDMENT; SPUTTERING; SURFACE ROUGHNESS;

THIN LAYERED MATERIALS;

MOLECULAR DYNAMICS;

EID: 0037378967     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01853-0     Document Type: Conference Paper

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