Freeform lens arrays for off-axis illumination in an optical lithography system

Applied Optics

Volumn 50, Issue 5, 2011, Pages 725-732

  Wu, Rengmao ^a   Li, Haifeng ^a   Zheng, Zhenrong ^a   Liu, Xu ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; PARTIAL DIFFERENTIAL EQUATIONS; PHOTOLITHOGRAPHY;

CONSERVATION LAW; COORDINATE RELATIONS; FIRST ORDER PARTIAL DIFFERENTIAL EQUATIONS; INTENSITY VARIATIONS; IRRADIANCE DISTRIBUTION; MAXIMUM EFFICIENCY; OFF AXIS ILLUMINATION; OPTICAL PERFORMANCE;

LENSES;

EID: 79952000711     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.50.000725     Document Type: Article

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