Free form micro-optics enable uniform off-axis illumination and superposition of high power laser devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7062, Issue , 2008, Pages

  Bizjak, Tanja ^a   Homburg, Oliver ^a   Bayer, Andreas ^a   Mitra, Thomas ^a   Asehke, Lutz ^a  

^a LIMO Lissotschenko Mikrooptik GmbH   (Germany)

Author keywords

Aberration compensation; Asymmetric cylindrical lenses; Beam shaping; Free form surface; Homogeneity; Lithographic illumination; Material processing; Refractive micro lens array; Tilted illumination; Tophat beam profile

Indexed keywords

ABERRATIONS; ABLATION; CRYSTALS; CUTTING; DC GENERATORS; HIGH POWER LASERS; LASER APPLICATIONS; LASER BEAM WELDING; LASER BEAMS; LASERS; LIGHT; MACHINING; MICROLENSES; OPTICAL INSTRUMENTS; SEMICONDUCTOR DIODES; SEMICONDUCTOR LASERS; WELDING;

ABERRATION COMPENSATION; ASYMMETRIC CYLINDRICAL LENSES; BEAM SHAPING; FREE FORM SURFACE; HOMOGENEITY; LITHOGRAPHIC ILLUMINATION; MATERIAL PROCESSING; REFRACTIVE MICRO-LENS ARRAY; TILTED ILLUMINATION; TOPHAT BEAM PROFILE;

SURFACES;

EID: 57549110446     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.794686     Document Type: Conference Paper

References (6)

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