Hair-like airflow sensing with piezoelectric vibrating diaphragm

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 1809-1812

  Jing, X M ^a   Miao, J M ^a   Xu, T ^a   Norford, L ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR FLOW VELOCITY; CONVERSION RATES; DATA-COMMUNICATION; DIAPHRAGM STIFFNESS; DRAG FORCES; MECHANICAL STRAIN; MICROELECTROMECHANICAL SYSTEMS; MICROSTRUCTURE DESIGN; PACKAGED DEVICE; PB(ZR , TI)O; PIEZOELECTRIC DIAPHRAGMS; PZT; RESONANT FREQUENCIES; RESONANT FREQUENCY SHIFT; SENSING ELEMENTS; TESTING RESULTS; THREE-DIMENSIONAL (3D); VIBRATING DIAPHRAGMS; WIND SPEED; WIND VELOCITY MEASUREMENT;

DIAPHRAGMS; DRAG; ELECTRONIC EQUIPMENT MANUFACTURE; FREQUENCY SHIFT KEYING; LEAD; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; SENSORS; THREE DIMENSIONAL; VELOCITY MEASUREMENT; ZIRCONIUM;

NATURAL FREQUENCIES;

EID: 79951888769     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5689993     Document Type: Conference Paper

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