Self-resonant flow sensor using resonance frequency shift by flow-induced vibration

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 511-514

  Kim, Kyoung Hwan ^a   Seo, Young Ho ^a  

^a Kangwon National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AIR FLOW; AIR FLOW VELOCITY; FLOW INDUCED VIBRATIONS; FLOW-SENSOR; FLUID DRAG FORCE; FLUID FLOW; MASS FLOW; MECHANICAL STRAIN; PZT; RESONANCE FREQUENCY SHIFT; RESONANT FLOW; RESONANT FREQUENCIES; RESONANT FREQUENCY SHIFT; RESONANT VIBRATIONS; SILICON CANTILEVER BEAM; SURFACE STRESS; THERMAL FLUXES;

AIR; ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; DRAG; FLUID STRUCTURE INTERACTION; FREQUENCY SHIFT KEYING; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PILE FOUNDATIONS; SENSORS;

FLOW OF FLUIDS;

EID: 65949104080     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805431     Document Type: Conference Paper

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