Optical stability investigation of high-performance silicon-based VUV photodiodes

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 132-135

  Shi, L ^a   Nanver, L K ^a   Sakic A ^a   Nihtianov, S ^b   Gottwald, A ^c   Kroth, U ^c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATTENUATION LENGTHS; ISOLATING LAYER; OPTICAL STABILITY; PURE BORON; SILICON-BASED; SPECTRAL RANGE; VACUUM ULTRAVIOLETS;

BORON; BORON COMPOUNDS; PHOTODIODES;

SENSORS;

EID: 79951879325     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690669     Document Type: Conference Paper

References (10)

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