A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing

Proceedings - Winter Simulation Conference

Volumn , Issue , 2010, Pages 2474-2485

  Klemmt, Andreas ^a   Lange, Jan ^a   Weigert, Gerald ^a   Lehmann, Frank ^b   Seyfert, Jens ^b  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEX MANUFACTURING SYSTEMS; GRANULARITY LEVELS; MACHINE UTILIZATION; MIXED INTEGER PROGRAMMING; OPTIMIZATION APPROACH; OPTIMIZATION MODELS; PROCESS CONSTRAINTS; RESOURCE CONSTRAINT; SEMICONDUCTOR MANUFACTURING; SETUP COSTS; WAFER FABRICATIONS;

MANUFACTURE; OPTIMIZATION; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE;

INTEGER PROGRAMMING;

EID: 79951618940     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2010.5678943     Document Type: Conference Paper

References (10)

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