Shift scheduling for steppers in the semiconductor wafer fabrication process

IIE Transactions (Institute of Industrial Engineers)

Volumn 34, Issue 2, 2002, Pages 167-177

  Kim, Sooyoung ^a   Yea, Seung Hee ^b   Kim, Bokang ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ASSEMBLY MACHINES; HEURISTIC METHODS; INTEGER PROGRAMMING; MATHEMATICAL MODELS; OPERATIONS RESEARCH; PRODUCTION ENGINEERING; SCHEDULING; SILICON WAFERS;

MIXED INTEGER PROGRAMMING; SHIFT SCHEDULING; STEPPER MACHINES; WORK-IN-PROCESS LEVELS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0036468657     PISSN: 0740817X     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1011995914535     Document Type: Article

References (12)

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6. Dynamic control of a cellular-line production system under variations in the product mix
7. Production planning and scheduling practices across the semiconductor industry
8. Dynamic release control for semiconductor wafer fabrication lines
9. Efficient scheduling policies to reduce mean and variance of cycle time in semiconductor manufacturing plants
10. A review of production planning and scheduling models in the semiconductor industry, part I: System characteristics, performance evaluation, and production planning
11. A review of production planning and scheduling models in the semiconductor industry, part II: Shop-floor control
12. Scheduling semiconductor wafer fabrication