Using constraint satisfaction approach to solve the capacity allocation problem for photolithography area

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

Volumn 3982 LNCS, Issue , 2006, Pages 610-620

  Chung, Shu Hsing ^a   Huang, Chun Ying ^a   Lee, Amy Hsin I ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b CHUNG HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CONSTRAINT THEORY; MATHEMATICAL MODELS; PHOTOLITHOGRAPHY; PROBLEM SOLVING; SEARCH ENGINES;

CAPACITY ALLOCATION PROBLEM FOR PHOTOLITHOGRAPHY AREA (CAPPA); CONSTRAINT SATISFACTION PROBLEM (CSP); MACHINE DEDICATION; PROCESS CAPABILITY;

FREQUENCY ALLOCATION;

EID: 33745877613     PISSN: 03029743     EISSN: 16113349     Source Type: Book Series    
DOI: 10.1007/11751595_65     Document Type: Conference Paper

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