SCOPUS 정보 검색 플랫폼

Applied Physics A: Materials Science and Processing

Volumn 102, Issue 2, 2011, Pages 265-269

Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: A transparent and conductive platform for microdevices

(5) Beke, S a Korosi L b Sugioka, K a Midorikawa, K a Dekany I b

a RIKEN (Japan)

b UNIVERSITY OF SZEGED (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

CUTTING EDGES; ELECTRICAL PROPERTY; FEMTOSECONDS; HOLLOW STRUCTURE; INDIUM TIN OXIDE; INDIUM TIN OXIDE FILMS; INTERNAL SURFACES; LASER DIRECT WRITING; MICRO DEVICES; MICROELECTROMECHANICAL SYSTEMS; SN-DOPED; THREE-DIMENSIONAL MICROSTRUCTURES; TRANSPARENT MATERIAL;

CONDUCTIVE FILMS; ELECTRIC PROPERTIES; GLASS LASERS; INDIUM; INDIUM COMPOUNDS; ITO GLASS; LIGHT SENSITIVE MATERIALS; MEMS; MICROELECTROMECHANICAL DEVICES; OXIDE FILMS; PHOTOSENSITIVITY; PORTABLE EQUIPMENT; SOL-GEL PROCESS; TIN; TIN OXIDES;

PHOTOSENSITIVE GLASS;

EID: 79651468916 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-010-6173-3 Document Type: Article

Times cited : (5)

References (32)

1
- 33747133014
- Developing optofluidic technology through the fusion of microfluidics and optics
- DOI 10.1038/nature05060, PII NATURE05060
- D. Psaltis S.R. Quake C. Yang 2006 Nature 442 381 10.1038/nature05060 2006Natur.442..381P (Pubitemid 44264781)
- (2006) Nature , vol.442 , Issue.7101 , pp. 381-386
- Psaltis, D.¹ Quake, S.R.² Yang, C.³

2
- 0037357191
- 10.1007/s00339-002-1937-z 2003ApPhA.76.857M
- M. Masuda K. Sugioka Y. Cheng N. Aoki M. Kawachi K. Shihoyama K. Toyoda H. Helvajian K. Midorikawa 2003 Appl. Phys. A 76 857 10.1007/s00339-002-1937-z 2003ApPhA..76..857M
- (2003) Appl. Phys. A , vol.76 , pp. 857
- Masuda, M.¹ Sugioka, K.² Cheng, Y.³ Aoki, N.⁴ Kawachi, M.⁵ Shihoyama, K.⁶ Toyoda, K.⁷ Helvajian, H.⁸ Midorikawa, K.⁹

3
- 0037217029
- 10.1364/OL.28.000055 2003OptL.28.55C
- Y. Cheng K. Sugioka K. Midorikawa M. Masuda K. Toyoda M. Kawachi K. Shihoyama 2003 Opt. Lett. 28 55 10.1364/OL.28.000055 2003OptL...28...55C
- (2003) Opt. Lett. , vol.28 , pp. 55
- Cheng, Y.¹ Sugioka, K.² Midorikawa, K.³ Masuda, M.⁴ Toyoda, K.⁵ Kawachi, M.⁶ Shihoyama, K.⁷

4
- 0038339015
- 10.1364/OL.28.001144 2003OptL.28.1144C
- Y. Cheng K. Sugioka K. Midorikawa M. Masuda K. Toyoda M. Kawachi K. Shihoyama 2003 Opt. Lett. 28 1144 10.1364/OL.28.001144 2003OptL...28.1144C
- (2003) Opt. Lett. , vol.28 , pp. 1144
- Cheng, Y.¹ Sugioka, K.² Midorikawa, K.³ Masuda, M.⁴ Toyoda, K.⁵ Kawachi, M.⁶ Shihoyama, K.⁷

5
- 4344560198
- 2004ApPhA.79.815S
- K. Sugioka M. Masuda T. Hongo Y. Cheng K. Shihoyama K. Midorikawa 2004 Appl. Phys. A 78 815 2004ApPhA..79..815S
- (2004) Appl. Phys. A , vol.78 , pp. 815
- Sugioka, K.¹ Masuda, M.² Hongo, T.³ Cheng, Y.⁴ Shihoyama, K.⁵ Midorikawa, K.⁶

6
- 1842586802
- 10.1007/s00339-003-2447-3 2004ApPhA.78.1029M
- M. Masuda K. Sugioka Y. Cheng T. Hongo K. Shihoyama H. Takai I. Miyamoto K. Midorikawa 2004 Appl. Phys. A 78 1029 10.1007/s00339-003-2447-3 2004ApPhA..78.1029M
- (2004) Appl. Phys. A , vol.78 , pp. 1029
- Masuda, M.¹ Sugioka, K.² Cheng, Y.³ Hongo, T.⁴ Shihoyama, K.⁵ Takai, H.⁶ Miyamoto, I.⁷ Midorikawa, K.⁸

7
- 4544298103
- 10.1364/OL.29.002007 2004OptL.29.2007C
- Y. Cheng K. Sugioka K. Midorikawa 2004 Opt. Lett. 29 2007 10.1364/OL.29.002007 2004OptL...29.2007C
- (2004) Opt. Lett. , vol.29 , pp. 2007
- Cheng, Y.¹ Sugioka, K.² Midorikawa, K.³

8
- 3142594023
- 10.2494/photopolymer.17.397
- K. Sugioka Y. Cheng K. Midorikawa 2004 J. Photopolym. Sci. Technol. 17 397 10.2494/photopolymer.17.397
- (2004) J. Photopolym. Sci. Technol. , vol.17 , pp. 397
- Sugioka, K.¹ Cheng, Y.² Midorikawa, K.³

9
- 18144392005
- Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture
- DOI 10.1007/s00339-005-3225-1
- K. Sugioka Y. Cheng K. Midorikawa 2005 Appl. Phys. A 81 1 10.1007/s00339-005-3225-1 2005ApPhA..81....1S (Pubitemid 40609456)
- (2005) Applied Physics A: Materials Science and Processing , vol.81 , Issue.1 , pp. 1-10
- Sugioka, K.¹ Cheng, Y.² Midorikawa, K.³

10
- 19944372077
- Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications
- DOI 10.1016/j.apsusc.2005.03.078, PII S0169433205003983, 4th International Conference on Photo-Excited Processes and Applications 4-ICEPA
- Y. Cheng K. Sugioka K. Midorikawa 2005 Appl. Surf. Sci. 248 172 10.1016/j.apsusc.2005.03.078 2005ApSS..248..172C (Pubitemid 40752233)
- (2005) Applied Surface Science , vol.248 , Issue.1-4 , pp. 172-176
- Cheng, Y.¹ Sugioka, K.² Midorikawa, K.³

11
- 20444455029
- Investigation of photoreaction mechanism of photosensitive glass by femtosecond laser
- DOI 10.1063/1.1856223, 063517
- T. Hongo K. Sugioka H. Niino Y. Cheng M. Masuda I. Miyamoto H. Takai K. Midorikawa 2005 J. Appl. Phys. 97 063517 10.1063/1.1856223 2005JAP....97f3517H (Pubitemid 40818143)
- (2005) Journal of Applied Physics , vol.97 , Issue.6 , pp. 1-4
- Hongo, T.¹ Sugioka, K.² Niino, H.³ Cheng, Y.⁴ Masuda, M.⁵ Miyamoto, I.⁶ Takai, H.⁷ Midorikawa, K.⁸

12
- 33747455683
- Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining
- DOI 10.1007/s00339-006-3672-3
- Y. Cheng H. Tsai K. Sugioka K. Midorikawa 2006 Appl. Phys. A 85 11 10.1007/s00339-006-3672-3 2006ApPhA..85...11C (Pubitemid 44259594)
- (2006) Applied Physics A: Materials Science and Processing , vol.85 , Issue.1 , pp. 11-14
- Cheng, Y.¹ Tsai, H.L.² Sugioka, K.³ Midorikawa, K.⁴

13
- 33644540529
- 10.1364/OL.31.000208 2006OptL.31.208S
- K. Sugioka Y. Cheng K. Midorikawa F. Takase H. Takai 2006 Opt. Lett. 31 208 10.1364/OL.31.000208 2006OptL...31..208S
- (2006) Opt. Lett. , vol.31 , pp. 208
- Sugioka, K.¹ Cheng, Y.² Midorikawa, K.³ Takase, F.⁴ Takai, H.⁵

14
- 77649215045
- 10.1016/j.tsf.2009.09.188 2010TSF.518.3042E
- M. Eritt C. May K. Leo M. Toerker C. Radehaus 2010 Thin Solid Films 518 3042 10.1016/j.tsf.2009.09.188 2010TSF...518.3042E
- (2010) Thin Solid Films , vol.518 , pp. 3042
- Eritt, M.¹ May, C.² Leo, K.³ Toerker, M.⁴ Radehaus, C.⁵

15
- 0035934352
- Studies on modifications of ITO surfaces in OLED devices by Taguchi methods
- DOI 10.1016/S0921-5107(01)00583-9, PII S0921510701005839
- J.-M. Liu P.-Y. Lu W.-K. Weng 2001 Mater. Sci. Eng. B 85 209 10.1016/S0921-5107(01)00583-9 (Pubitemid 32673999)
- (2001) Materials Science and Engineering B: Solid-State Materials for Advanced Technology , vol.85 , Issue.2-3 , pp. 209-211
- Liu, J.-M.¹ Lu, P.-Y.² Weng, W.-K.³

16
- 1642324177
- 10.1016/j.tsf.2003.08.067 2003TSF.445.342A
- N.R. Armstrong C. Carter C. Donley A. Simmonds P. Lee M. Brumbach B. Kippelen B. Domercq S. Yoo 2003 Thin Solid Films 445 342 10.1016/j.tsf.2003.08. 067 2003TSF...445..342A
- (2003) Thin Solid Films , vol.445 , pp. 342
- Armstrong, N.R.¹ Carter, C.² Donley, C.³ Simmonds, A.⁴ Lee, P.⁵ Brumbach, M.⁶ Kippelen, B.⁷ Domercq, B.⁸ Yoo, S.⁹

17
- 34548834451
- ITO deposited by pyrosol for photovoltaic applications
- 24, DOI 10.1016/j.tsf.2007.03.097, PII S0040609007004269
- A.B. Chebotareva G.G. Untila T.N. Kost S. Jorgensen A.G. Ulyashin 2007 Thin Solid Films 515 8505 10.1016/j.tsf.2007.03.097 2007TSF...515.8505C (Pubitemid 47444326)
- (2007) Thin Solid Films , vol.515 , Issue.SPEC. ISS. , pp. 8505-8510
- Chebotareva, A.B.¹ Untila, G.G.² Kost, T.N.³ Jorgensen, S.⁴ Ulyashin, A.G.⁵

18
- 0037157419
- Transparent and conducting ITO films: New developments and applications
- DOI 10.1016/S0040-6090(02)00163-3, PII S0040609002001633
- C.G. Granqvist A. Hultåker 2002 Thin Solid Films 411 1 10.1016/S0040-6090(02)00163-3 2002TSF...411....1G (Pubitemid 35281597)
- (2002) Thin Solid Films , vol.411 , Issue.1 , pp. 1-5
- Granqvist, C.G.¹ Hultaker, A.²

19
- 77949913453
- 10.1016/j.snb.2010.02.029
- C.R. Zamarreño M. Hernaez I. Del Villar I.R. Matias F.J. Arregui 2010 Sens. Actuators B, Chem. 146 414 10.1016/j.snb.2010.02.029
- (2010) Sens. Actuators B, Chem. , vol.146 , pp. 414
- Zamarreño, C.R.¹ Hernaez, M.² Del Villar, I.³ Matias, I.R.⁴ Arregui, F.J.⁵

20
- 1642328624
- 10.1016/S0040-6090(03)01153-2 2003TSF.445.251F
- P. Frach D. Glö K. Goedicke M. Fahland W.-M. Gnehr 2003 Thin Solid Films 445 251 10.1016/S0040-6090(03)01153-2 2003TSF...445..251F
- (2003) Thin Solid Films , vol.445 , pp. 251
- Frach, P.¹ Glö, D.² Goedicke, K.³ Fahland, M.⁴ Gnehr, W.-M.⁵

21
- 34247159064
- The role of oxygen and hydrogen partial pressures on structural and optical properties of ITO films deposited by reactive rf-magnetron sputtering
- DOI 10.1016/j.apsusc.2007.01.107, PII S0169433207000323
- R. Das K. Adhikary S. Ray 2007 Appl. Surf. Sci. 253 6068 10.1016/j.apsusc.2007.01.107 2007ApSS..253.6068D (Pubitemid 46589703)
- (2007) Applied Surface Science , vol.253 , Issue.14 , pp. 6068-6073
- Das, R.¹ Adhikary, K.² Ray, S.³

22
- 77957018156
- 10.1016/j.tsf.2010.03.023 2010TSF.518S.10L
- S.-Y. Lien 2010 Thin Solid Films 518 S10 10.1016/j.tsf.2010.03.023 2010TSF...518S..10L
- (2010) Thin Solid Films , vol.518 , pp. 10
- Lien, S.-Y.¹

23
- 34247590004
- M. Yamaguchi A. Ide-Ektessabi H. Nomura N. Yasui 2004 Thin Solid Films 115 447 448
- (2004) Thin Solid Films , vol.115 , pp. 447-448
- Yamaguchi, M.¹ Ide-Ektessabi, A.² Nomura, H.³ Yasui, N.⁴

24
- 58949096503
- 10.1016/j.tsf.2008.11.027
- N. Manavizadeh F. Akbari Boroumand E. Asl-Soleimani F. Raissi S. Bagherzadeh A. Khodayari M. Amin Rasouli 2009 Thin Solid Films 517 2324 10.1016/j.tsf.2008.11.027
- (2009) Thin Solid Films , vol.517 , pp. 2324
- Manavizadeh, N.¹ Akbari Boroumand, F.² Asl-Soleimani, E.³ Raissi, F.⁴ Bagherzadeh, S.⁵ Khodayari, A.⁶ Amin Rasouli, M.⁷

25
- 32844460199
- 3 gas sensing
- DOI 10.1016/j.msec.2005.10.037, PII S0928493105003838
- H. Mbarek M. Saadoun B. Bessaïs 2006 Mater. Sci. Eng. C 26 500 10.1016/j.msec.2005.10.037 (Pubitemid 43254830)
- (2006) Materials Science and Engineering C , vol.26 , Issue.2-3 , pp. 500-504
- Mbarek, H.¹ Saadoun, M.² Bessais, B.³

26
- 77956228700
- 10.1016/j.tsf.2010.06.026 2010TSF.518.6761L
- T.L. Li S.L.C. Hsu 2010 Thin Solid Films 518 6761 10.1016/j.tsf.2010.06. 026 2010TSF...518.6761L
- (2010) Thin Solid Films , vol.518 , pp. 6761
- Li, T.L.¹ Hsu, S.L.C.²

27
- 77957115351
- 10.2494/photopolymer.23.39
- Y.J. Kang M. Okada Y. Haruyama K. Kanda S. Matsui, et al. 2010 J. Photopolym. Sci. Technol. 23 39 10.2494/photopolymer.23.39
- (2010) J. Photopolym. Sci. Technol. , vol.23 , pp. 39
- Kang, Y.J.¹ Okada, M.² Haruyama, Y.³ Kanda, K.⁴ Matsui, S.⁵

28
- 55949125874
- 10.1016/j.optmat.2008.06.005 2008OptMa.31.429K
- S. Kundu P.K. Biswas 2008 Opt. Mater. 31 429 10.1016/j.optmat.2008.06.005 2008OptMa..31..429K
- (2008) Opt. Mater. , vol.31 , pp. 429
- Kundu, S.¹ Biswas, P.K.²

29
- 67349138199
- 10.1007/s10971-009-1931-4
- E. Celik U. Aybarc M.F. Ebeoglugil I. Birlik O. Culha 2009 J. Sol-Gel Sci. Technol. 50 337 10.1007/s10971-009-1931-4
- (2009) J. Sol-Gel Sci. Technol. , vol.50 , pp. 337
- Celik, E.¹ Aybarc, U.² Ebeoglugil, M.F.³ Birlik, I.⁴ Culha, O.⁵

30
- 0009719969
- M.J. Alam D.C. Cameron 2000 Thin Solid Films 455 377 378
- (2000) Thin Solid Films , vol.455 , pp. 377-378
- Alam, M.J.¹ Cameron, D.C.²

31
- 70349145798
- 10.1002/pssa.200881781 2009PSSAR.206.2128H
- T.M. Hammad 2009 Phys. Status Solidi A 206 2128 10.1002/pssa.200881781 2009PSSAR.206.2128H
- (2009) Phys. Status Solidi A , vol.206 , pp. 2128
- Hammad, T.M.¹

32
- 77951887770
- 10.1002/lpor.200810074
- K. Sugioka Y. Hanada K. Midorikawa 2010 Laser Photonics Rev. 4 386 10.1002/lpor.200810074
- (2010) Laser Photonics Rev. , vol.4 , pp. 386
- Sugioka, K.¹ Hanada, Y.² Midorikawa, K.³

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