SCOPUS 정보 검색 플랫폼

Volumn 89, Issue 1, 2011, Pages 19-26

Gas-phase reaction chemistry of 1,1-dimethyl-1-silacyclobutane as a precursor gas in the hot-wire chemical vapor deposition processFormation of tetramethylsilane and trimethylsilane

(2) Tong, L a Shi, Y a

a UNIVERSITY OF CALGARY (Canada)

Author keywords

1,1 dimethyl 1 silacyclobutane; gas phase reaction chemistry; hot wire chemical vapour deposition; silene; silylene; vacuum UV laser single photon ionization mass spectrometry

Indexed keywords

GAS-PHASE REACTION CHEMISTRY; HOT-WIRE CHEMICAL VAPOUR DEPOSITION; SILACYCLOBUTANE; SILENE; SILYLENES; VACUUM UV LASER SINGLE PHOTON IONIZATION MASS SPECTROMETRY;

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; GASES; MASS SPECTROMETRY; PARTICLE BEAMS; PHASE INTERFACES; PHOTOIONIZATION; PHOTONS; VACUUM; WIRE;

IONIZATION OF GASES;

EID: 79251613414 PISSN: 00084042 EISSN: None Source Type: Journal
DOI: 10.1139/V10-147 Document Type: Article

Times cited : (4)

References (31)

1
- 84986532423
- (1)
- Chiu, H.-T.; Lee, S.-F. J. Chin. Chem. Soc. 1992, 39, 293.
- (1992) J. Chin. Chem. Soc. , vol.39 , pp. 293
- Chiu, H.-T.¹ Lee, S.-F.²

2
- 33646676062
- Detecting free radicals during the hot wire chemical vapor deposition of amorphous silicon carbide films using single-source precursors
- DOI 10.1116/1.2194023
- Zaharias, G. A.; Duan, H. L.; Bent, S. F. J. Vac. Sci. Technol. A 2006, 24 (3), 542. 10.1116/1.2194023 (Pubitemid 43731716)
- (2006) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.24 , Issue.3 , pp. 542-549
- Zaharias, G.A.¹ Duan, H.L.² Bent, S.F.³

3
- 84943507874
- 10.1039/j29680000419
- Flowers, M. C.; Gusel'nikov, L. E. J. Chem. Soc. B 1968, 419. 10.1039/j29680000419
- (1968) J. Chem. Soc. B , Issue.3 , pp. 419
- Flowers, M.C.¹ Gusel'Nikov, L.E.²

4
- 37049129878
- (4)
- Gusel'nikov, L. E.; Flowers, M. C. Chem. Commun. 1967, 864.
- (1967) Chem. Commun. , pp. 864
- Gusel'Nikov, L.E.¹ Flowers, M.C.²

5
- 2042519969
- (5)
- Basu, S.; Davidson, I. M. T.; Laupert, R.; Potzinger, P. Ber. Bunsenges. Phys. Chem. 1979, 83, 1282.
- (1979) Ber. Bunsenges. Phys. Chem. , vol.83 , pp. 1282
- Basu, S.¹ Davidson, I.M.T.² Laupert, R.³ Potzinger, P.⁴

6
- 0011403432
- (6);10.1016/S0022-328X(00)81154-7
- Gusel'nikov, L. E.; Nametkin, N. S. J. Organomet. Chem. 1979, 169 (2), 155. 10.1016/S0022-328X(00)81154-7
- (1979) J. Organomet. Chem. , vol.169 , Issue.2 , pp. 155
- Gusel'Nikov, L.E.¹ Nametkin, N.S.²

7
- 0142222277
- (7)10.1021/ja00528a064
- Mahaffy, P. G.; Gutowsky, R.; Montgomery, L. K. J. Am. Chem. Soc. 1980, 102 (8), 2854. 10.1021/ja00528a064
- (1980) J. Am. Chem. Soc. , vol.102 , Issue.8 , pp. 2854
- Mahaffy, P.G.¹ Gutowsky, R.² Montgomery, L.K.³

8
- 84943962230
- (8);10.1016/S0022-328X(00)92572-5
- Gusel'nikov, L. E.; Volkova, V. V.; Avakyan, V. G.; Nametkin, N. S. J. Organomet. Chem. 1980, 201 (1), 137. 10.1016/S0022-328X(00)92572-5
- (1980) J. Organomet. Chem. , vol.201 , Issue.1 , pp. 137
- Gusel'Nikov, L.E.¹ Volkova, V.V.² Avakyan, V.G.³ Nametkin, N.S.⁴

9
- 0001559468
- (9);10.1016/S0022-328X(00)92571-3
- Nefedov, O. M.; Maltsev, A. K.; Khabashesku, V. N.; Korolev, V. A. J. Organomet. Chem. 1980, 201 (1), 123. 10.1016/S0022-328X(00)92571-3
- (1980) J. Organomet. Chem. , vol.201 , Issue.1 , pp. 123
- Nefedov, O.M.¹ Maltsev, A.K.² Khabashesku, V.N.³ Korolev, N.V.V.A.⁴

10
- 0038360153
- (10);10.1021/ja00395a036
- Koenig, T.; McKenna, W. J. Am. Chem. Soc. 1981, 103 (5), 1212. 10.1021/ja00395a036
- (1981) J. Am. Chem. Soc. , vol.103 , Issue.5 , pp. 1212
- Koenig, T.¹ McKenna, W.²

11
- 3743049868
- (11);10.1021/j100212a022
- Dyke, J. M.; Josland, G. D.; Lewis, R. A.; Morris, A. J. Phys. Chem. 1982, 86 (15), 2913. 10.1021/j100212a022
- (1982) J. Phys. Chem. , vol.86 , Issue.15 , pp. 2913
- Dyke, J.M.¹ Josland, G.D.² Lewis, R.A.³ Morris, A.⁴

12
- 0142222256
- (12)10.1021/j100500a001
- Tokach, S.; Boudjouk, P.; Koob, R. D. J. Phys. Chem. 1978, 82 (11), 1203. 10.1021/j100500a001
- (1978) J. Phys. Chem. , vol.82 , Issue.11 , pp. 1203
- Tokach, S.¹ Boudjouk, P.² Koob, R.D.³

13
- 0001524296
- (13);10.1016/S0022-328X(00)87921-8
- Low, H. C.; John, P. J. Organomet. Chem. 1980, 201 (2), 363. 10.1016/S0022-328X(00)87921-8
- (1980) J. Organomet. Chem. , vol.201 , Issue.2 , pp. 363
- Low, H.C.¹ John, P.²

14
- 0000182901
- (14)10.1021/j100362a011
- Brix, T.; Arthur, N. L.; Potzinger, P. J. Phys. Chem. 1989, 93 (25), 8193. 10.1021/j100362a011
- (1989) J. Phys. Chem. , vol.93 , Issue.25 , pp. 8193
- Brix, T.¹ Arthur, N.L.² Potzinger, P.³

15
- 76249133046
- (15);10.1002/jms.1712 20049692
- Tong, L.; Shi, Y. J. J. Mass Spectrom. 2010, 45 (2), 215. 10.1002/jms.1712 20049692
- (2010) J. Mass Spectrom. , vol.45 , Issue.2 , pp. 215
- Tong, L.¹ Shi, Y.J.²

16
- 0001459494
- (16)10.1021/ja00215a065
- Schühle, U.; Pallix, J. B.; Becker, C. H. J. Am. Chem. Soc. 1988, 110 (7), 2323. 10.1021/ja00215a065
- (1988) J. Am. Chem. Soc. , vol.110 , Issue.7 , pp. 2323
- Schühle, U.¹ Pallix, J.B.² Becker, C.H.³

17
- 0000157698
- (17)10.1006/mchj.1999.1745
- Butcher, D. J. Microchem. J. 1999, 62 (3), 354. 10.1006/mchj.1999.1745
- (1999) Microchem. J. , vol.62 , Issue.3 , pp. 354
- Butcher, D.J.¹

18
- 33745198217
- An overview of organic molecule soft ionization using vacuum ultraviolet laser radiation
- DOI 10.1139/v05-193
- Shi, Y. J.; Lipson, R. H. Can. J. Chem. 2005, 83 (11), 1891. 10.1139/v05-193 (Pubitemid 43907136)
- (2005) Canadian Journal of Chemistry , vol.83 , Issue.11 , pp. 1891-1902
- Shi, Y.J.¹ Lipson, R.H.²

19
- 0011644052
- (19)10.1016/S0009-2614(99)01026-X
- Li, J.; Bierbaum, V. M.; Leone, S. R. Chem. Phys. Lett. 1999, 313 (1-2), 76. 10.1016/S0009-2614(99)01026-X
- (1999) Chem. Phys. Lett. , vol.313 , Issue.12 , pp. 76
- Li, J.¹ Bierbaum, V.M.² Leone, S.R.³

20
- 15944396423
- (20);10.1021/jp045010r 16838990
- Chambreau, S. D.; Lemieux, J.; Wang, L.; Zhang, J. S. J. Phys. Chem. A 2005, 109 (10), 2190. 10.1021/jp045010r 16838990
- (2005) J. Phys. Chem. A , vol.109 , Issue.10 , pp. 2190
- Chambreau, S.D.¹ Lemieux, J.² Wang, L.³ Zhang, J.S.⁴

21
- 34548588674
- In Situ direct sampling mass spectrometric study on formation of polycyclic aromatic hydrocarbons in toluene pyrolysis
- DOI 10.1021/jp071813d
- Shukla, B.; Susa, A.; Miyoshi, A.; Koshi, M. J. Phys. Chem. A 2007, 111 (34), 8308. 10.1021/jp071813d 17685593 (Pubitemid 47387982)
- (2007) Journal of Physical Chemistry A , vol.111 , Issue.34 , pp. 8308-8324
- Shukla, B.¹ Susa, A.² Miyoshi, A.³ Koshi, M.⁴

22
- 0035911456
- (22)10.1063/1.1355994
- Duan, H. L.; Zaharias, G. A.; Bent, S. F. Appl. Phys. Lett. 2001, 78 (12), 1784. 10.1063/1.1355994
- (2001) Appl. Phys. Lett. , vol.78 , Issue.12 , pp. 1784
- Duan, H.L.¹ Zaharias, G.A.² Bent, S.F.³

23
- 34249303832
- In situ diagnostics of the decomposition of silacyclobutane on a hot filament by vacuum ultraviolet laser ionization mass spectrometry
- DOI 10.1002/jms.1186
- Shi, Y. J.; Lo, B.; Tong, L.; Li, X. M.; Eustergerling, B. D.; Sorensen, T. S. J. Mass Spectrom. 2007, 42 (5), 575. 10.1002/jms.1186 17285587 (Pubitemid 46808480)
- (2007) Journal of Mass Spectrometry , vol.42 , Issue.5 , pp. 575-583
- Shi, Y.J.¹ Lo, B.² Tong, L.³ Li, X.⁴ Eustergerling, B.D.⁵ Sorensen, T.S.⁶

24
- 34247334202
- (24)10.1016/j.ijms.2007.02.051
- Li, X. M.; Eustergerling, B. D.; Shi, Y. J. Int. J. Mass Spectrom. 2007, 263 (2-3), 233. 10.1016/j.ijms.2007.02.051
- (2007) Int. J. Mass Spectrom. , vol.263 , Issue.23 , pp. 233
- Li, X.M.¹ Eustergerling, B.D.² Shi, Y.J.³

25
- 33746357899
- 6 studied by threshold photoelectron-photoion coincidence spectroscopy
- DOI 10.1021/jp0566358
- Dvalos, J. Z.; Baer, T. J. Phys. Chem. A 2006, 110 (27), 8572. 10.1021/jp0566358 16821843 (Pubitemid 44115530)
- (2006) Journal of Physical Chemistry A , vol.110 , Issue.27 , pp. 8572-8579
- Davalos, J.Z.¹ Baer, T.²

26
- 0000162065
- (26)10.1021/jp981957f
- Al-Rubaiey, N.; Carpenter, I. W.; Walsh, R.; Becerra, R.; Gordon, M. S. J. Phys. Chem. A 1998, 102 (44), 8564. 10.1021/jp981957f
- (1998) J. Phys. Chem. A , vol.102 , Issue.44 , pp. 8564
- Al-Rubaiey, N.¹ Carpenter, I.W.² Walsh, R.³ Becerra, R.⁴ Gordon, M.S.⁵

27
- 0001797628
- Patai, S., Rappoport, Z., Eds. New York: Wiley
- Apeloig, Y. In The Chemistry of Organic Silicon Compounds, Vol. 1; Patai, S., Rappoport, Z., Eds. New York: Wiley, 1989; p 57.
- (1989) The Chemistry of Organic Silicon Compounds , vol.1 , Issue.27 , pp. 57
- Apeloig, Y.¹

28
- 43049083368
- (28)10.1039/b718743b 18446255
- Shi, Y. J.; Li, X. M.; Tong, L.; Toukabri, R.; Eustergerling, B. Phys. Chem. Chem. Phys. 2008, 10 (18), 2543. 10.1039/b718743b 18446255
- (2008) Phys. Chem. Chem. Phys. , vol.10 , Issue.18 , pp. 2543
- Shi, Y.J.¹ Li, X.M.² Tong, L.³ Toukabri, R.⁴ Eustergerling, B.⁵

29
- 64349120414
- (29);10.1016/j.tsf.2009.01.058
- Tong, L.; Shi, Y. J. Thin Solid Films 2009, 517 (12), 3461. 10.1016/j.tsf.2009.01.058
- (2009) Thin Solid Films , vol.517 , Issue.12 , pp. 3461
- Tong, L.¹ Shi, Y.J.²

30
- 0000451125
- (30);10.1039/ft9908601407
- Arthur, N. L.; Potzinger, P.; Reimann, B.; Steenbergen, H. P. J. Chem. Soc., Faraday Trans. 1990, 86 (9), 1407. 10.1039/ft9908601407
- (1990) J. Chem. Soc., Faraday Trans. , vol.86 , Issue.9 , pp. 1407
- Arthur, N.L.¹ Potzinger, P.² Reimann, B.³ Steenbergen, H.P.⁴

31
- 0041966460
- (31);10.1021/om00134a006
- Auner, N.; Davidson, I. M. T.; Ijadi-Maghsoodi, S.; Lawrence, F. T. Organometallics 1986, 5 (3), 431. 10.1021/om00134a006
- (1986) Organometallics , vol.5 , Issue.3 , pp. 431
- Auner, N.¹ Davidson, I.M.T.² Ijadi-Maghsoodi, S.³ Lawrence, F.T.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.