A mechanistic study of gas-phase reactions with 1,1,3,3-tetramethyl-1,3-disilacyclobutane in the hot-wire chemical vapor deposition process

Thin Solid Films

Volumn 517, Issue 12, 2009, Pages 3461-3465

  Tong, L ^a   Shi, Y J ^a  

^a UNIVERSITY OF CALGARY   (Canada)

Author keywords

1,1,3,3 tetramethyl 1,3 disilacyclobutane; Catalytic CVD; Hot wire CVD; Silicon carbide; Vacuum ultraviolet single photon ionization

Indexed keywords

1,1,3,3-TETRAMETHYL-1,3-DISILACYCLOBUTANE; CATALYTIC CVD; CHEMICAL SPECIES; COMBINATION REACTIONS; DIRECT DECOMPOSITIONS; GAS-PHASE; GAS-PHASE REACTIONS; HOT WIRE CVD; HOT-WIRE CHEMICAL VAPOR DEPOSITIONS; HYDROGEN ABSTRACTION REACTIONS; MECHANISTIC STUDIES; METHYL RADICALS; METHYLSILANE; PARENT MOLECULES; SECONDARY REACTIONS; SI-C BONDS; TIME-OF FLIGHT MASS SPECTROMETRIES; TRIMETHYL; TUNGSTEN FILAMENTS; VACUUM ULTRAVIOLET SINGLE PHOTON IONIZATION;

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; FILAMENTS (LAMP); HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; HYDROGEN; IONIZATION OF GASES; MASS SPECTROMETERS; MASS SPECTROMETRY; MULTIPHOTON PROCESSES; PARTICLE BEAMS; PHASE INTERFACES; PHOTOIONIZATION; PHOTONS; SILICON CARBIDE; TUNGSTEN; VACUUM; WIRE;

COUPLED CIRCUITS;

EID: 64349120414     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.058     Document Type: Article

References (21)

1. Steckl A.J., Yuan C., Li J.P., and Loboda M.J. Appl. Phys. Lett. 63 (1993) 3347
2. Lee M.S., and Bent S.F. J. Vac. Sci. Technol. A 16 (1998) 1658
3. Johnson A.D., Perrin J., Mucha J.A., and Ibbotson D.E. J. Phys. Chem. 97 (1993) 12937
4. Chiu H.-T., and Lee S.-F. J. Chin. Chem. Soc. 39 (1992) 293
5. Larkin D.J., and Interrante L.V. Chem. Mater. 4 (1992) 22
6. Boo J.-H., Lee S.-B., Lee K.-W., Yu K.-S., Kim Y., Yeon S.H., and Jung I.N. J. Vac. Sci. Technol. A 19 (2001) 1887
7. Auner N., Davidson I.M.T., Ijadi-Maghsoodi S., and Lawrence F.T. Organomet. 5 (1986) 431
8. Pola J., Bastl Z., Šubrt J., and Taylor R. J. Mater. Chem. 5 (1995) 1345
9. Barton T.J., Marquardt G., and Kilgour J.A. J. Organomet. Chem. 85 (1975) 317
10. Nametkin N.S., Gusel′nikov L.E., Volpina E.A., and Vdovin V.M. Dokl. Akad. Nauk SSSR 220 (1975) 386 (English Translation P.81)
11. Kalasinsky V.F., and Pechsirl S. J. Phys. Chem. 86 (1982) 5110
12. Wróbel A.M., and Stańczyk W. Chem. Mater. 6 (1994) 1766
13. Li X.M., Eustergerling B.D., and Shi Y.J. Int. J. Mass Spectrom. 263 (2007) 233
14. Shi Y.J., Lo B., Tong L., Eustergerling B.D., and Sorensen T.S. J. Mass Spectrom. 42 (2007) 575
15. Davalos J.Z., and Baer T. J. Phys. Chem. A 110 (2006) 8572
16. Shi Y.J., Li X.M., Tong L., Toukabri R., and Eustergerling B.D. Phys. Chem. Chem. Phys. 10 (2008) 2543
17. Dyke J.M., Josland G.D., Lewis R.A., and Morris A. J. Phys. Chem. 86 (1982) 2913
18. Gusel'nikov L.E., Nametkin N.S., and Vdovin V.M. Acc. Chem. Res. 8 (1975) 18
19. Barton T.J., and McIntosh C.L. J. Chem. Soc., Chem. Commun. (1972) 861
20. Ahmed M., Potzinger P., and Wagner H.Gg. J. Photochem. Photobio. A 86 (1995) 33
21. Arthur N.L., Potzinger P., Reimann B., and Steenbergen H.P. J. Chem. Soc. Faraday Trans. 86 (1990) 1407