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Volumn 263, Issue 2-3, 2007, Pages 233-242

Mass spectrometric study of gas-phase chemistry in a hot-wire chemical vapor deposition reactor with tetramethylsilane

Author keywords

Hot wire chemical vapor deposition; Silene; Tetramethylsilane; Vacuum ultraviolet laser ionization mass spectrometry

Indexed keywords


EID: 34247334202     PISSN: 13873806     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijms.2007.02.051     Document Type: Article
Times cited : (33)

References (36)
  • 35
    • 34249303832 scopus 로고    scopus 로고
    • Y.J. Shi, B. Lo, L. Tong, X.M. Li, B.D. Eustergerling, T.S. Sorensen, J. Mass Spectrom. (2007), doi:10.1002/jms.1186.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.