The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering

Applied Surface Science

Volumn 257, Issue 9, 2011, Pages 4339-4343

  Phan, Duy Thach ^a   Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

Post annealing; r.f. Sputtering; SAW devices; ZnO

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ANNEALING; ATOMIC FORCE MICROSCOPY; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; II-VI SEMICONDUCTORS; INSERTION LOSSES; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; OXIDE FILMS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ELECTROMECHANICAL COUPLING COEFFICIENTS; POST ANNEALING; POST DEPOSITION ANNEALING; R.F. SPUTTERING; RADIO FREQUENCY MAGNETRON SPUTTERING; ROOT MEAN SQUARE (RMS) SURFACE ROUGHNESS; SAW DEVICE; SURFACE ACOUSTIC WAVE RESONATORS;

THIN FILMS;

EID: 78951485559     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.12.053     Document Type: Article

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