SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5539, Issue , 2004, Pages 38-47

Fabrication of parabolic nanofocusing x-ray lenses

(10) Kurapova, O a Feste, S a Gather, M a Gunzler T F a Hunger, T a Kuhlmann, M a Patommel, J a Schroer, C G a Lengeler, B a Van Der Hart, A b

a RWTH AACHEN UNIVERSITY (Germany)

b FORSCHUNGSZENTRUM JÜLICH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; DIAMONDS; ELECTRON BEAM LITHOGRAPHY; FABRICATION; LASER BEAMS; LIGHT SOURCES; NANOTECHNOLOGY; REACTIVE ION ETCHING; SILICON; SYNCHROTRON RADIATION; X RAY OPTICS; X RAYS;

ETCHING PARAMETERS; MICROBEAMS; MICROFABRICATION; REFRACTIVE LENSES;

LENSES;

EID: 20144370425 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.563921 Document Type: Conference Paper

Times cited : (6)

References (19)

1
- 0036587436
- N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, H. Takano, T. Ninomiya, S. Tamura, M. Yasumoto, J. Synchrotron Rad., 9, pp. 182-186, 2002
- (2002) J. Synchrotron Rad. , vol.9 , pp. 182-186
- Kamijo, N.¹ Suzuki, Y.² Awaji, M.³ Takeuchi, A.⁴ Takano, H.⁵ Ninomiya, T.⁶ Tamura, S.⁷ Yasumoto, M.⁸

2
- 15844425048
- 2 surface structure
- SRI (San Francisco)
- 2 Surface Structure", in Optic development, SRI 2003 (San Francisco), pp.744
- (2003) Optic Development , pp. 744
- Kuznetsov, R.¹ Yunkin, V.² Drakopoulos, M.³ Snigireva, I.⁴ Snigirev, A.⁵

3
- 85012240128
- Beryllium parabolic refractive X-ray lenses
- SRI (San Francisco)
- B. Lengeler, C. Schroer, M. Kuhlmann, B. Benner, T.F. Günzler, O. Kurapova, A. Somogyi, A. Snigirev, I. Snigireva, "Beryllium Parabolic Refractive X-Ray Lenses", in Optic development, SRI 2003 (San Francisco), pp.748
- (2003) Optic Development , pp. 748
- Lengeler, B.¹ Schroer, C.² Kuhlmann, M.³ Benner, B.⁴ Günzler, T.F.⁵ Kurapova, O.⁶ Somogyi, A.⁷ Snigirev, A.⁸ Snigireva, I.⁹

4
- 15844420866
- Metal monocapillary optics produced by hydraulic pressing
- SRI (San Francisco)
- G. Hirsch, "Metal Monocapillary Optics Produced by Hydraulic Pressing", in Optic development, SRI 2003 (San Francisco), pp.728
- (2003) Optic Development , pp. 728
- Hirsch, G.¹

5
- 85012306161
- X-ray focusing mirror fabricated with bent-polishing method
- SRI (San Francisco)
- A. Takeuchi, Y. Suzuki, and H. Takano, "X-Ray Focusing Mirror Fabricated with Bent-Polishing Method", in Optic development, SRI 2003 (San Francisco), pp.760
- (2003) Optic Development , pp. 760
- Takeuchi, A.¹ Suzuki, Y.² Takano, H.³

6
- 36549052119
- Fluorescence microtomography using nanofocusing refractive X-ray lenses
- U. Bonse, ed., Proceedings of the SPIE. To be published
- C: Schroer, T. F. Günzler, M. Kuhlmann, O. Kurapova, S. Feste, M. Schweitzer, B. Lengeler, W. H. Schröder, M. Drakopoulos, A. Somogyi, A. S. Simionovici, A. Snigirev, and I. Snigireva, "Fluorescence Microtomography Using Nanofocusing Refractive X-Ray Lenses", in Developments in X-Ray Tomography IV, U. Bonse, ed., Proceedings of the SPIE 5539, 2004. To be published.
- (2004) Developments in X-ray Tomography IV , vol.5539
- Schroer, C.¹ Günzler, T.F.² Kuhlmann, M.³ Kurapova, O.⁴ Feste, S.⁵ Schweitzer, M.⁶ Lengeler, B.⁷ Schröder, W.H.⁸ Drakopoulos, M.⁹ Somogyi, A.¹⁰ Simionovici, A.S.¹¹ Snigirev, A.¹² Snigireva, I.¹³

7
- 0001547240
- Nanometer focusing of hard x-ray by phase zone plates
- W. Yun, B. Lai, Z. Cai, J. Maser, D. Legnini, E. Gluskin, Z. Chen, A.A: Krasnoperova, Y. Vladimirsky, R. Cerrina, E. Di Fabrizio, and M. Gentili, "Nanometer focusing of hard x-ray by phase zone plates", Rev. Sci Instrum. 70 (5), pp. 2238-2241, 1999
- (1999) Rev. Sci Instrum. , vol.70 , Issue.5 , pp. 2238-2241
- Yun, W.¹ Lai, B.² Cai, Z.³ Maser, J.⁴ Legnini, D.⁵ Gluskin, E.⁶ Chen, Z.⁷ Krasnoperova, A.A.⁸ Vladimirsky, Y.⁹ Cerrina, R.¹⁰ Di Fabrizio, E.¹¹ Gentili, M.¹²

8
- 0035763342
- Submicron focusing of hard x-ray with reflecting surface at the ESRF
- edited by I. McNulty, vol. 4499 of Proceedings of the SPIE
- O. Hignette, G. Rostaing, P. Cloetens, A. Rommeveaux, W. Ludwig, and A. Freund, "Submicron focusing of hard x-ray with reflecting surface at the ESRF", in X-Ray Micro- and Nano-Focusing, Application and Techniques II, edited by I. McNulty, 2001, vol. 4499 of Proceedings of the SPIE, pp.105-116
- (2001) X-ray Micro- and Nano-focusing, Application and Techniques II , pp. 105-116
- Hignette, O.¹ Rostaing, G.² Cloetens, P.³ Rommeveaux, A.⁴ Ludwig, W.⁵ Freund, A.⁶

9
- 0036740912
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, A. Suvorov, M. Yabashi, k. Tamasaku, T. Ishikava, and Y. Mori, J. Synchrotron Rad., 9, pp.313-316, 2002
- (2002) J. Synchrotron Rad. , vol.9 , pp. 313-316
- Yamauchi, K.¹ Yamamura, K.² Mimura, H.³ Sano, Y.⁴ Saito, A.⁵ Suvorov, A.⁶ Yabashi, M.⁷ Tamasaku, K.⁸ Ishikava, T.⁹ Mori, Y.¹⁰

10
- 0037416639
- Nanofocusing parabolic refractive x-ray lenses
- C. G. Schroer, M. Kuhlmann, U.T. Hunger, T.F. Günzler, O. Kurapova, S. Feste, F. Frehse, B. Lengeler, M. Drakopoulos, A. Somogyi, A. S. Simionovichi, A. Snigirev, I. Snigireva, C. Schug, and W. H. Schröder, "Nanofocusing parabolic refractive x-ray lenses", Appl. Phys. Lett., 82 (9), pp. 1485-1487, 2003
- (2003) Appl. Phys. Lett. , vol.82 , Issue.9 , pp. 1485-1487
- Schroer, C.G.¹ Kuhlmann, M.² Hunger, U.T.³ Günzler, T.F.⁴ Kurapova, O.⁵ Feste, S.⁶ Frehse, F.⁷ Lengeler, B.⁸ Drakopoulos, M.⁹ Somogyi, A.¹⁰ Simionovichi, A.S.¹¹ Snigirev, A.¹² Snigireva, I.¹³ Schug, C.¹⁴ Schröder, W.H.¹⁵

11
- 0033438293
- Imaging by parabolic refractive lenses in the hard x-ray range
- B. Lengeler, C. Schroer, J. Tümmler, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, and M. Drakopoulos, "Imaging by parabolic refractive lenses in the hard x-ray range", J. Synchrotron Rod., 6, pp.1153-1167, 1999
- (1999) J. Synchrotron Rod. , vol.6 , pp. 1153-1167
- Lengeler, B.¹ Schroer, C.² Tümmler, J.³ Benner, B.⁴ Richwin, M.⁵ Snigirev, A.⁶ Snigireva, I.⁷ Drakopoulos, M.⁸

12
- 0035905279
- Lithium metal for x-ray refractive optics
- E. M. Dufresne, D.A. Arms, R. Clarke, N. R. Pereira, S. B. Dierker, D. Foster, "Lithium metal for x-ray refractive optics", Appl. Phys. Lett., 79 (25), pp. 4085-4087, 2001
- (2001) Appl. Phys. Lett. , vol.79 , Issue.25 , pp. 4085-4087
- Dufresne, E.M.¹ Arms, D.A.² Clarke, R.³ Pereira, N.R.⁴ Dierker, S.B.⁵ Foster, D.⁶

13
- 15844400485
- "Chemical Backgrounder", http://www.nsc.org/library/chemical/
- Chemical Backgrounder

14
- 0003754025
- Dissertation RWTH Aachen, Shaker Verlag
- J. Tümmler, "Development of Compound Refractive Lenses for Hard X-Rays", Dissertation RWTH Aachen, Shaker Verlag 2000, p. 17
- (2000) Development of Compound Refractive Lenses for Hard X-rays , pp. 17
- Tümmler, J.¹

15
- 0037206624
- Plasma etch models based on different plasma chemistry for micro-electromechanical-system application
- A.K. Paul, A.K. Dimri, R.P Bajpai "Plasma etch models based on different plasma chemistry for micro-electromechanical-system application", Vacuum, 68, pp. 191-196, 2003
- (2003) Vacuum , vol.68 , pp. 191-196
- Paul, A.K.¹ Dimri, A.K.² Bajpai, R.P.³

16
- 15844388370
- Lections, Tab. 1
- D. Slovetsky, "Mechanism of the materials etching in plasma", Lections, http://silicon3.narod.ru/Plazm/lec0/Mexplasm.htm, Tab. 1
- Mechanism of the Materials Etching in Plasma
- Slovetsky, D.¹

17
- 15844382299
- Uppsala Sweden (UPTEC F 1401-5757, 03014)
- J. Enlund, "ICP Etching of Single Crystal HTHP and CVD Diamond", Uppsala Sweden (UPTEC F 1401-5757, 03014), 2003, p.25
- (2003) ICP Etching of Single Crystal HTHP and CVD Diamond , pp. 25
- Enlund, J.¹

18
- 0004173989
- Noyes publications, New Jersey, USA
- H.O. Pierson, "Handbook of carbon, graphite, diamond and fullers", Noyes publications, New Jersey, USA, 1993, p.141
- (1993) Handbook of Carbon, Graphite, Diamond and Fullers , pp. 141
- Pierson, H.O.¹

19
- 15844424165
- Calculating, using the software CRLCALC which was developed by C. G. Schroer
- Calculating, using the software CRLCALC which was developed by C. G. Schroer, www.xray-lens.de

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.