Planar sets of cross X-ray refractive lenses from SU-8 polymer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5539, Issue , 2004, Pages 235-243

  Nazmov, Vladimir ^a,b   Reznikova, Elena ^a   Somogyi, Andrea ^c   Mohr, Jurgen ^a   Saile, Volker ^a,b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF KARLSRUHE   (Germany)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

LIGA; SU 8; X ray lens; X ray lithography; X ray microbeam; X ray optics

Indexed keywords

HEAT RESISTANCE; LENSES; LITHOGRAPHY; MASKS; MICROSTRUCTURE; POLYMERS; REFRACTION; SUBSTRATES;

X-RAY LENSES; X-RAY LITHOGRAPHY; X-RAY MASKS; X-RAY MICROBEAMS;

X RAY OPTICS;

EID: 15844383823     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.562615     Document Type: Conference Paper

References (24)

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