Characterisation and control of a 1DOF Monolithic Piezoactuator (MPA)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4568, Issue , 2001, Pages 151-162

  Perez, Ricardo ^a   Agnus, Joël ^b   Breguet, Jean Marc ^a   Chaillet, Nicolas ^b   Bleuler, H ^a   Clavel, R ^a  

^a EPFL   (Switzerland)

^b CNRS   (France)

Author keywords

Charge control; Hysteresis loop; Micro and nano positionning; Piezo actuators; Piezoelectric amplification

Indexed keywords

BANDWIDTH; DEFORMATION; DEGREES OF FREEDOM (MECHANICS); ELECTRIC CHARGE; ELECTRIC POTENTIAL; HYSTERESIS; PIEZOELECTRIC DEVICES; POSITION CONTROL;

MONOLITHIC PIEZOACTUATORS;

ACTUATORS;

EID: 0035765953     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.444122     Document Type: Article

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