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Volumn 5, Issue 1, 2011, Pages 25-27
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Dynamic photoluminescence lifetime imaging for the characterisation of silicon wafers
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Author keywords
Imaging; Lifetime; Photoluminescence; Si; Wafers
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Indexed keywords
CHARACTERISATION;
CRYSTALLINE SILICON WAFERS;
IMAGING;
INGAAS CAMERA;
INTEGRATION TIME;
LIFETIME;
LUMINESCENCE EMISSION;
MODULATED EXCITATIONS;
MULTICRYSTALLINE SILICON WAFERS;
OPTICAL EXCITATIONS;
PHOTOLUMINESCENCE LIFETIME;
PHOTOLUMINESCENCE MEASUREMENTS;
PL IMAGE;
SI;
TIME DEPENDENT;
WAFERS;
CAMERAS;
CARRIER LIFETIME;
IMAGING TECHNIQUES;
PHOTOEXCITATION;
PHOTOLUMINESCENCE;
POLYSILICON;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
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EID: 78650979276
PISSN: 18626254
EISSN: 18626270
Source Type: Journal
DOI: 10.1002/pssr.201004426 Document Type: Article |
Times cited : (28)
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References (11)
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