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Volumn , Issue , 2009, Pages 822-829

3D integration technologies for miniaturized Tire Pressure Monitor System (TPMS)

Author keywords

[No Author keywords available]

Indexed keywords

HETEROGENEOUS SYSTEMS; INTEGRATED CIRCUITS (ICS); INTEGRATED DEVICE; MECHANICAL CHARACTERIZATIONS; MECHANICAL INTERCONNECTIONS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); TECHNOLOGICAL CHALLENGES; THROUGH SILICON VIAS;

EID: 78650363188     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (7)

References (17)
  • 1
    • 84876941261 scopus 로고    scopus 로고
    • Sensonor Technologies A.S. N-3192 Horten, Norway
    • Sensonor Technologies AS, Knudsrødveien 7, N-3192 Horten, Norway
    • Knudsrødveien 7
  • 2
    • 84876905874 scopus 로고    scopus 로고
    • Infineon Technologies AG, www.infineon.com
  • 3
    • 84876923790 scopus 로고    scopus 로고
    • http://ecubes.org
  • 4
    • 4444275224 scopus 로고    scopus 로고
    • Vertical system integration by using inter-chip vias and solid-liquid interdiffusion bonding
    • A. Klumpp et al, "Vertical System Integration by Using Inter-Chip Vias and Solid-Liquid Interdiffusion Bonding", Jpn J Appl Phys, Vol. 43, No. 7A (2004), pp. L829-830.
    • (2004) Jpn J Appl Phys , vol.43 A , Issue.7
    • Klumpp, A.1
  • 6
    • 68949217830 scopus 로고    scopus 로고
    • Technologies enabling 3D stacking of MEMS
    • Munich, oct 1-2
    • M. Taklo et al, "Technologies enabling 3D stacking of MEMS", IEEE workshop on 3D System Integration, Munich, oct 1-2, 2007
    • (2007) IEEE Workshop on 3D System Integration
    • Taklo, M.1
  • 7
    • 84877268476 scopus 로고    scopus 로고
    • 3D integration technologies for wireless sensor systems (e-CUBES)
    • Scottsdale, Arizona, mar 17 - 20
    • P. Ramm et al, "3D Integration Technologies for Wireless Sensor Systems (e-CUBES)", iMAPS Int. Conf. Device Packaging, Scottsdale, Arizona, mar 17 - 20, 2008
    • (2008) IMAPS Int. Conf. Device Packaging
    • Ramm, P.1
  • 9
    • 84876899543 scopus 로고    scopus 로고
    • 3D MEMS and IC integration
    • Boston-MA, des 01-05
    • Taklo et al., "3D MEMS and IC Integration", MRS fall meeting, Boston-MA, des 01-05, 2008
    • (2008) MRS Fall Meeting
    • Taklo1
  • 10
    • 78650363188 scopus 로고    scopus 로고
    • 3D integration technologies for miniaturized tire pressure monitor system (TPMS)
    • Scottsdale, Arizona, mar 10-12
    • Lietaer, N. et al., "3D Integration Technologies For Miniaturized Tire Pressure Monitor System (TPMS)", iMAPS 5th Int. Conf. Device Packaging, Scottsdale, Arizona, mar 10-12, 2009.
    • (2009) IMAPS 5th Int. Conf. Device Packaging
    • Lietaer, N.1
  • 14
    • 34247557694 scopus 로고    scopus 로고
    • Development of cost-effective high-density through-wafer interconnects for 3D microsystems
    • N. Lietaer et al, "Development of cost-effective high-density through-wafer interconnects for 3D microsystems", J Micromech MicroEng, Vol. 16, pp.S29-S34, 2006.
    • (2006) J Micromech MicroEng , vol.16
    • Lietaer, N.1
  • 15
    • 84872545907 scopus 로고    scopus 로고
    • Kulicke and Soffa Ind Inc Fort Washington, PA 19034, USA
    • Kulicke and Soffa Ind Inc, 1005 Virginia Drive, Fort Washington, PA 19034, USA
    • 1005 Virginia Drive
  • 16
    • 84876918739 scopus 로고    scopus 로고
    • Datacon A-6240 Radfeld, Austria
    • Datacon, Innstrasse 16, A-6240 Radfeld, Austria
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  • 17
    • 84876933439 scopus 로고    scopus 로고
    • Fraunhofer IZM Building 17°, D-13355 Berlin, Germany
    • Fraunhofer IZM, Gustav-Meyer-Allee 25, Building 17°, D-13355 Berlin, Germany
    • Gustav-Meyer-Allee 25


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.