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Volumn 1267, Issue , 2010, Pages 329-334
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In-plane thermal conductivity determination in Silicon On Insulator (SOI) structures through thermoreflectance measurements
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Author keywords
[No Author keywords available]
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Indexed keywords
HEAT CONDUCTION;
INDIUM COMPOUNDS;
SILICON ON INSULATOR TECHNOLOGY;
THERMOELECTRICITY;
HEAT CONDUCTION EQUATIONS;
LOW THERMAL CONDUCTIVITY;
MULTI-PHYSICS MODELING;
NUMERICAL SOLUTION;
PHONON-BOUNDARY SCATTERING;
SILICON ON INSULATOR STRUCTURES;
SILICON-ON- INSULATORS (SOI);
THERMOREFLECTANCE MEASUREMENT;
THERMAL CONDUCTIVITY;
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EID: 78650318969
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-1267-dd12-01 Document Type: Conference Paper |
Times cited : (3)
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References (17)
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