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Volumn 257, Issue 6, 2011, Pages 2066-2073

Morphology and distribution of subsurface damage in optical fused silica parts: Bound-abrasive grinding

Author keywords

Depth of cut; Diamond grinding; Feeding rate; Fused silica; Subsurface damage; Wheel peripheral speed

Indexed keywords

ABRASIVES; CRACKS; DIAMOND CUTTING TOOLS; DIAMONDS; GRINDING (MACHINING); GRINDING WHEELS; MORPHOLOGY; WHEELS;

EID: 78650256911     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.09.051     Document Type: Article
Times cited : (101)

References (38)
  • 1
    • 85056058993 scopus 로고    scopus 로고
    • IOP Publishing Ltd. London, UK
    • R.M. Wood Laser-Induced Damage of Optical Materials 2003 IOP Publishing Ltd. London, UK Chapter 5 and references therein; see also the Proceedings of the Annual Boulder Damage Symposia (1969-2009) SPIE
    • (2003) Laser-Induced Damage of Optical Materials
    • Wood, R.M.1
  • 3
    • 0015614409 scopus 로고
    • Role of cracks, pores, and absorbing inclusions on laser induced damage threshold at surfaces of transparent dielectrics
    • N. Bloembergen Role of cracks, pores, and absorbing inclusions on laser induced damage threshold at surfaces of transparent dielectrics Appl. Opt. 12 1973 661 664
    • (1973) Appl. Opt. , vol.12 , pp. 661-664
    • Bloembergen, N.1
  • 5
    • 34848895067 scopus 로고    scopus 로고
    • Machining and Processing Technologies and Quality of Silicon Wafer Surfaces
    • T. Kasai Machining and processing technologies and quality of silicon wafer surfaces J. Surf. Sci. Soc. Japan 21 2000 688 695 (in Japanese) (Pubitemid 33207849)
    • (2000) JOURNAL- SURFACE SCIENCE SOCIETY OF JAPAN , vol.21 , Issue.11 , pp. 688-695
    • Kasai, T.1
  • 11
    • 58149208117 scopus 로고
    • Mirror surface grinding of silicon wafer with electrolytic in-process dressing
    • H. Ohmori, and T. Nakagawa Mirror surface grinding of silicon wafer with electrolytic in-process dressing Ann. CIRP 39 1990 329 332
    • (1990) Ann. CIRP , vol.39 , pp. 329-332
    • Ohmori, H.1    Nakagawa, T.2
  • 12
    • 78650297627 scopus 로고    scopus 로고
    • A tutorial on deterministic microgrinding
    • J. Schoen A tutorial on deterministic microgrinding Convergence 7 November/December 1999
    • (1999) Convergence , vol.7 , Issue.NOVEMBER-DECEMBER
    • Schoen, J.1
  • 13
    • 58449134826 scopus 로고    scopus 로고
    • Diamond-turned optics manufacturing and precision mechanical metrology
    • M. Warre Diamond-turned optics manufacturing and precision mechanical metrology Opt. Photon. News 19 3 2008 18 21
    • (2008) Opt. Photon. News , vol.19 , Issue.3 , pp. 18-21
    • Warre, M.1
  • 16
    • 0013223866 scopus 로고
    • Optical glass fabrication technology. 2: Relationship between surface roughness and subsurface damage
    • P.P. Hed, and D.F. Edwards Optical glass fabrication technology. 2: relationship between surface roughness and subsurface damage Appl. Opt. 26 1987 4677 4680
    • (1987) Appl. Opt. , vol.26 , pp. 4677-4680
    • Hed, P.P.1    Edwards, D.F.2
  • 18
    • 70349260900 scopus 로고    scopus 로고
    • Controlling subsurface damage in neodymium-doped phosphate glass
    • W. Zhang, and J. Zhu Controlling subsurface damage in neodymium-doped phosphate glass Optik 120 2009 752 757
    • (2009) Optik , vol.120 , pp. 752-757
    • Zhang, W.1    Zhu, J.2
  • 19
    • 48949098426 scopus 로고    scopus 로고
    • Subsurface damage distribution in the lapping process
    • Z. Wang, Y. Wu, Y. Dai, and S. Li Subsurface damage distribution in the lapping process Appl. Opt. 47 2008 1417 1426
    • (2008) Appl. Opt. , vol.47 , pp. 1417-1426
    • Wang, Z.1    Wu, Y.2    Dai, Y.3    Li, S.4
  • 21
    • 0009564846 scopus 로고
    • Acad. Sci., Moscow-Leningrad U.S.S.R
    • N.N. Kachalov Technology of Grinding and Polishing Sheet Glass 1958 Acad. Sci., Moscow-Leningrad U.S.S.R (in Russian) [translated by W. Mao and Y. Yang, (China Industry Press, Peking, China, 1965), Chapter 3 (in Chinese)]
    • (1958) Technology of Grinding and Polishing Sheet Glass
    • Kachalov, N.N.1
  • 23
    • 17644364740 scopus 로고    scopus 로고
    • Subsurface damage in some single crystalline optical materials
    • J.A. Randi, J.C. Lambropoulos, and S.D. Jacobs Subsurface damage in some single crystalline optical materials Appl. Opt. 44 2005 2241 2249
    • (2005) Appl. Opt. , vol.44 , pp. 2241-2249
    • Randi, J.A.1    Lambropoulos, J.C.2    Jacobs, S.D.3
  • 24
    • 35448938373 scopus 로고    scopus 로고
    • Subsurface damage and microstructure development in precision microground hard ceramics using magnetorheological finishing spots
    • S.N. Shafrir, J.C. Lambropoulos, and S.D. Jacobs Subsurface damage and microstructure development in precision microground hard ceramics using magnetorheological finishing spots Appl. Opt. 46 2007 5500 5515
    • (2007) Appl. Opt. , vol.46 , pp. 5500-5515
    • Shafrir, S.N.1    Lambropoulos, J.C.2    Jacobs, S.D.3
  • 25
    • 77955611386 scopus 로고    scopus 로고
    • Investigation of surface and subsurface damage in diamond grinding of optical glass using hybrid copper-resin-bonded diamond wheel
    • Q. Zhao, J. Chen, J. Yao, and S. Zhou Investigation of surface and subsurface damage in diamond grinding of optical glass using hybrid copper-resin-bonded diamond wheel J. Vac. Sci. Technol. B 27 2009 1489 1495
    • (2009) J. Vac. Sci. Technol. , vol.27 , pp. 1489-1495
    • Zhao, Q.1    Chen, J.2    Yao, J.3    Zhou, S.4
  • 26
    • 33644597575 scopus 로고    scopus 로고
    • MRF applications: Measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique
    • J.A. Menapace, P.J. Davis, W.A. Steele, L.L. Wong, T.I. Suratwala, and P.E. Miller MRF applications: measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique Proc. SPIE 5991 2005 599103
    • (2005) Proc. SPIE , vol.5991 , pp. 599103
    • Menapace, J.A.1    Davis, P.J.2    Steele, W.A.3    Wong, L.L.4    Suratwala, T.I.5    Miller, P.E.6
  • 27
    • 78650298268 scopus 로고    scopus 로고
    • Model 80# is a product of Changxing Diamond Abrasives Co., Ltd., China; the others are manufactured by Winter Diamond Tools, Saint-Gobain Diamantwerkzeuge GmbH & Co., Germany
    • Model 80# is a product of Changxing Diamond Abrasives Co., Ltd., China; the others are manufactured by Winter Diamond Tools, Saint-Gobain Diamantwerkzeuge GmbH & Co., Germany.
  • 28
    • 70349733154 scopus 로고    scopus 로고
    • Microgrinding of flat surfaces on single-disc lapping machine
    • A. Barylski, and M. Deja Microgrinding of flat surfaces on single-disc lapping machine Int. J. Mach. Mach. Mater. 5 2009 245 267
    • (2009) Int. J. Mach. Mach. Mater. , vol.5 , pp. 245-267
    • Barylski, A.1    Deja, M.2
  • 29
    • 24044508056 scopus 로고    scopus 로고
    • The basic study about the effect of single point grinding on the bending strength of brittle material
    • Y. Ahn, and S.S. Park The basic study about the effect of single point grinding on the bending strength of brittle material KSME Int. J. 12 1998 598 605 (Pubitemid 128683913)
    • (1998) KSME International Journal , vol.12 , Issue.4 , pp. 598-605
    • Ahn, Y.1    Park, S.-S.2
  • 30
    • 0003749418 scopus 로고
    • Second ed. Cambridge University Press Cambridge, UK
    • B. Lawn Fracture of Brittle Solids Second ed. 1993 Cambridge University Press Cambridge, UK Chapter 8
    • (1993) Fracture of Brittle Solids
    • Lawn, B.1
  • 31
    • 0010719233 scopus 로고    scopus 로고
    • Material removal mechanisms from grinding to polishing
    • J.C. Lambropoulos, S.D. Jacobs, and J. Ruckman Material removal mechanisms from grinding to polishing Ceram. Trans. 102 1999 113 128
    • (1999) Ceram. Trans. , vol.102 , pp. 113-128
    • Lambropoulos, J.C.1    Jacobs, S.D.2    Ruckman, J.3
  • 32
    • 44749093595 scopus 로고    scopus 로고
    • Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes
    • S. Li, Z. Wang, and Y. Wu Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes J. Mater. Proc. Technol. 205 2008 34 41
    • (2008) J. Mater. Proc. Technol. , vol.205 , pp. 34-41
    • Li, S.1    Wang, Z.2    Wu, Y.3
  • 33
    • 0018457776 scopus 로고
    • INDENTATION DEFORMATION/FRACTURE OF NORMAL AND ANOMALOUS GLASSES.
    • A. Arora, D.B. Marshall, B.R. Lawn, and M.V. Swain Indentation deformation/fracture of normal and anomalous glasses J. Non-Cryst. Solids 31 1979 415 428 (Pubitemid 9457001)
    • (1979) J Non Cryst Solids , vol.31 , Issue.3 , pp. 415-428
    • Arora, A.1    Marshall, D.B.2    Lawn, B.R.3    Swain, M.V.4
  • 34
    • 0346154864 scopus 로고    scopus 로고
    • Crack opening profiles of indentation cracks in normal and anomalous glasses
    • Z. Burghard, A. Zimmermann, J. Rodel, F. Aldinger, and B.R. Lawn Crack opening profiles of indentation cracks in normal and anomalous glasses Acta Mater. 52 2004 293 297
    • (2004) Acta Mater. , vol.52 , pp. 293-297
    • Burghard, Z.1    Zimmermann, A.2    Rodel, J.3    Aldinger, F.4    Lawn, B.R.5
  • 35
    • 0025473464 scopus 로고
    • The correlation of process parameters in grinding
    • A.A. Torrance The correlation of process parameters in grinding Wear 139 1990 383 401
    • (1990) Wear , vol.139 , pp. 383-401
    • Torrance, A.A.1
  • 37
    • 0037282375 scopus 로고    scopus 로고
    • Three-dimensional shape modeling of diamond abrasive grains measured by a scanning laser microscope
    • T. Mahmoud, J. Tamaki, and J. Yan Three-dimensional shape modeling of diamond abrasive grains measured by a scanning laser microscope Key Eng. Mater. 238-239 2003 131 136
    • (2003) Key Eng. Mater. , vol.238-239 , pp. 131-136
    • Mahmoud, T.1    Tamaki, J.2    Yan, J.3
  • 38
    • 0018491296 scopus 로고
    • Microfracture about scratches in brittle solids
    • M.V. Swain Microfracture about scratches in brittle solids Proc. R. Soc. Lond. A366 1979 575 597
    • (1979) Proc. R. Soc. Lond. , vol.366 , pp. 575-597
    • Swain, M.V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.