메뉴 건너뛰기




Volumn 205, Issue 1-3, 2008, Pages 34-41

Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes

Author keywords

Grinding; Lapping; MRF; Optical materials; Subsurface damage; Surface roughness

Indexed keywords

GRINDING (MACHINING); LAPPING; SURFACE ROUGHNESS;

EID: 44749093595     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.11.118     Document Type: Article
Times cited : (212)

References (27)
  • 1
    • 0027624527 scopus 로고
    • Three-body abrasion of brittle materials as studied by lapping
    • Buijs M., and Houten K.K. Three-body abrasion of brittle materials as studied by lapping. Wear 166 (1993) 237-245
    • (1993) Wear , vol.166 , pp. 237-245
    • Buijs, M.1    Houten, K.K.2
  • 3
    • 0019937282 scopus 로고
    • The response of solids to elastic/plastic indentation. I. Stresses and residual stresses
    • Chiang S.S., Marshall D.B., and Evans A.G. The response of solids to elastic/plastic indentation. I. Stresses and residual stresses. J. Appl. Phys. 53 1 (1982) 298-311
    • (1982) J. Appl. Phys. , vol.53 , Issue.1 , pp. 298-311
    • Chiang, S.S.1    Marshall, D.B.2    Evans, A.G.3
  • 4
    • 0025418269 scopus 로고
    • Direct observation and analysis of indentation cracking in glasses and ceramics
    • Cook R.F., and Pharr G.M. Direct observation and analysis of indentation cracking in glasses and ceramics. J. Am. Ceram. Soc. 73 4 (1990) 787-817
    • (1990) J. Am. Ceram. Soc. , vol.73 , Issue.4 , pp. 787-817
    • Cook, R.F.1    Pharr, G.M.2
  • 6
    • 27544471321 scopus 로고    scopus 로고
    • Non-destructive, real time direct measurement of subsurface damage
    • Fine K.R., Garbe R., Gip T., and Nguyen Q. Non-destructive, real time direct measurement of subsurface damage. Proc. SPIE 5799 (2005) 105-110
    • (2005) Proc. SPIE , vol.5799 , pp. 105-110
    • Fine, K.R.1    Garbe, R.2    Gip, T.3    Nguyen, Q.4
  • 7
    • 0038115235 scopus 로고    scopus 로고
    • Role of light intensification by cracks in optical breakdown on surfaces
    • Genin F.Y., Salleo A., Pistor T.V., and Chase L.L. Role of light intensification by cracks in optical breakdown on surfaces. J. Opt. Soc. Am. 18 10 (2001) 2607-2616
    • (2001) J. Opt. Soc. Am. , vol.18 , Issue.10 , pp. 2607-2616
    • Genin, F.Y.1    Salleo, A.2    Pistor, T.V.3    Chase, L.L.4
  • 9
    • 0013223866 scopus 로고
    • Optical glass fabrication technology. 2. Relationship between surface roughness and subsurface damage
    • Hed P.P., and Edwards D.F. Optical glass fabrication technology. 2. Relationship between surface roughness and subsurface damage. Appl. Opt. 26 21 (1987) 4677-4680
    • (1987) Appl. Opt. , vol.26 , Issue.21 , pp. 4677-4680
    • Hed, P.P.1    Edwards, D.F.2
  • 10
    • 0033317667 scopus 로고    scopus 로고
    • Non-contact estimate of grinding-induced subsurface damage
    • Lambropoulos J.C., Li Y., Funkenbusch P., and Ruckman J. Non-contact estimate of grinding-induced subsurface damage. Proc. SPIE 3782 (1999) 41-50
    • (1999) Proc. SPIE , vol.3782 , pp. 41-50
    • Lambropoulos, J.C.1    Li, Y.2    Funkenbusch, P.3    Ruckman, J.4
  • 11
    • 0010719233 scopus 로고    scopus 로고
    • Material removal mechanisms from grinding to polishing
    • Lambropoulos J.C., Jacobs S.D., and Ruckman J. Material removal mechanisms from grinding to polishing. Ceram. Trans. 102 (1999) 113-128
    • (1999) Ceram. Trans. , vol.102 , pp. 113-128
    • Lambropoulos, J.C.1    Jacobs, S.D.2    Ruckman, J.3
  • 12
    • 0019058952 scopus 로고
    • Elastic/plastic indentation damage in ceramics: the median/radial crack system
    • Lawn B.R., Evans A.G., and Marshall D.B. Elastic/plastic indentation damage in ceramics: the median/radial crack system. J. Am. Ceram. Soc. 63 9/10 (1982) 574-581
    • (1982) J. Am. Ceram. Soc. , vol.63 , Issue.9-10 , pp. 574-581
    • Lawn, B.R.1    Evans, A.G.2    Marshall, D.B.3
  • 13
    • 0037282375 scopus 로고    scopus 로고
    • Three-dimensional shape modeling of diamond abrasive grains measured by a scanning laser microscope
    • Mahmoud T., Tamaki J., and Yan J. Three-dimensional shape modeling of diamond abrasive grains measured by a scanning laser microscope. Key Eng. Mater. 238/239 (2003) 131-136
    • (2003) Key Eng. Mater. , vol.238-239 , pp. 131-136
    • Mahmoud, T.1    Tamaki, J.2    Yan, J.3
  • 14
    • 0021121730 scopus 로고
    • Geometrical effects in elastic/plastic indentation
    • Marshall D.B. Geometrical effects in elastic/plastic indentation. J. Am. Ceram. Soc. 67 1 (1983) 57-60
    • (1983) J. Am. Ceram. Soc. , vol.67 , Issue.1 , pp. 57-60
    • Marshall, D.B.1
  • 15
    • 0020206952 scopus 로고
    • Elastic/plastic indentation damage in ceramics: the lateral crack system
    • Marshall D.B., Lawn B.R., and Evans A.G. Elastic/plastic indentation damage in ceramics: the lateral crack system. J. Am. Ceram. Soc. 65 11 (1982) 561-566
    • (1982) J. Am. Ceram. Soc. , vol.65 , Issue.11 , pp. 561-566
    • Marshall, D.B.1    Lawn, B.R.2    Evans, A.G.3
  • 16
    • 33644597575 scopus 로고    scopus 로고
    • MRF applications: measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique
    • Menapace J.A., Davis P.J., Steele W.A., Wong L.L., Suratwala T.I., and Miller P.E. MRF applications: measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique. Proc. SPIE 5991 (2005) 39-49
    • (2005) Proc. SPIE , vol.5991 , pp. 39-49
    • Menapace, J.A.1    Davis, P.J.2    Steele, W.A.3    Wong, L.L.4    Suratwala, T.I.5    Miller, P.E.6
  • 18
    • 0034292298 scopus 로고    scopus 로고
    • Using vibration-assisted grinding to reduce subsurface damage
    • Qu W., Wang K., Miller M.H., Huang Y., and Chandra A. Using vibration-assisted grinding to reduce subsurface damage. Prec. Eng. 24 (2000) 329-337
    • (2000) Prec. Eng. , vol.24 , pp. 329-337
    • Qu, W.1    Wang, K.2    Miller, M.H.3    Huang, Y.4    Chandra, A.5
  • 19
    • 17644364740 scopus 로고    scopus 로고
    • Subsurface damage in some single crystalline optical materials
    • Randi J.A., Lambropoulos J.C., and Jacobs S.D. Subsurface damage in some single crystalline optical materials. Appl. Opt. 44 12 (2005) 2241-2249
    • (2005) Appl. Opt. , vol.44 , Issue.12 , pp. 2241-2249
    • Randi, J.A.1    Lambropoulos, J.C.2    Jacobs, S.D.3
  • 21
    • 20444411483 scopus 로고    scopus 로고
    • Subsurface damage in optical substrates
    • Shen J., Liu S., Yi K., He H., Shao J., and Fan Z. Subsurface damage in optical substrates. Optik 116 (2005) 288-294
    • (2005) Optik , vol.116 , pp. 288-294
    • Shen, J.1    Liu, S.2    Yi, K.3    He, H.4    Shao, J.5    Fan, Z.6
  • 22
    • 33644599449 scopus 로고    scopus 로고
    • Laser damage initiation and growth of antireflection coated S-FAP crystal surfaces prepared by pitch lap and magnetorheological finishing
    • Stolz C.J., Menapace J.A., Schaffers K.I., Bibeau C., Thomas M.D., and Griffin A.J. Laser damage initiation and growth of antireflection coated S-FAP crystal surfaces prepared by pitch lap and magnetorheological finishing. Proc. SPIE 5991 (2005) 449-455
    • (2005) Proc. SPIE , vol.5991 , pp. 449-455
    • Stolz, C.J.1    Menapace, J.A.2    Schaffers, K.I.3    Bibeau, C.4    Thomas, M.D.5    Griffin, A.J.6
  • 23
    • 33644920372 scopus 로고    scopus 로고
    • An investigation into parallel and cross grinding of BK7 glass
    • Sun X., Stephenson D.J., Ohnishi O., and Baldwin A. An investigation into parallel and cross grinding of BK7 glass. Prec. Eng. 30 (2006) 145-153
    • (2006) Prec. Eng. , vol.30 , pp. 145-153
    • Sun, X.1    Stephenson, D.J.2    Ohnishi, O.3    Baldwin, A.4
  • 24
    • 33749636853 scopus 로고    scopus 로고
    • Wheel wear and surface subsurface qualities when precision grinding optical materials
    • Tonnellier X., Shore P., Luo X., Morantz P., Baldwin A., Evans R., and Walker D. Wheel wear and surface subsurface qualities when precision grinding optical materials. Proc. SPIE 6273 (2006) 61-70
    • (2006) Proc. SPIE , vol.6273 , pp. 61-70
    • Tonnellier, X.1    Shore, P.2    Luo, X.3    Morantz, P.4    Baldwin, A.5    Evans, R.6    Walker, D.7
  • 25
    • 4344690329 scopus 로고    scopus 로고
    • Quasi-Brewster angle technique for evaluating the quality of optical surfaces
    • Wang J., and Maier R.L. Quasi-Brewster angle technique for evaluating the quality of optical surfaces. Proc. SPIE 5375 (2004) 1286-1294
    • (2004) Proc. SPIE , vol.5375 , pp. 1286-1294
    • Wang, J.1    Maier, R.L.2
  • 26
    • 44749090775 scopus 로고
    • Subsurface evaluation of ground ceramics
    • Zhang B., and Howes T.D. Subsurface evaluation of ground ceramics. Ann. CIRP 41 1 (1992) 141-144
    • (1992) Ann. CIRP , vol.41 , Issue.1 , pp. 141-144
    • Zhang, B.1    Howes, T.D.2
  • 27
    • 0028743008 scopus 로고
    • Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses
    • Zhou Y., Funkenbusch P.D., Quesnel D.J., Golini D., and Lindquist A. Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses. J. Am. Ceram. Soc. 77 (1994) 3277-3280
    • (1994) J. Am. Ceram. Soc. , vol.77 , pp. 3277-3280
    • Zhou, Y.1    Funkenbusch, P.D.2    Quesnel, D.J.3    Golini, D.4    Lindquist, A.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.