Characterization of indium tin oxide (ITO) thin films prepared by a sol-gel spin coating process

Ceramics International

Volumn 37, Issue 2, 2011, Pages 615-619

  Cho, Hyun ^a   Yun, Young Hoon ^b  

^a Pusan National University   (South Korea)

^b Dongshin University   (South Korea)

Author keywords

A. Sol gel process; Indium tin oxide films; Sheet resistance; Surface treatment; X ray photoelectron spectroscopy

Indexed keywords

A. SOL-GEL PROCESS; ACIDIC SOLUTIONS; ANNEALING TEMPERATURES; DOPING CONCENTRATION; HCL SOLUTION; HIGHER-DEGREE; INDIUM TIN OXIDE FILMS; INDIUM TIN OXIDE THIN FILMS; ITO FILMS; ITO THIN FILMS; OXIDATION STATE; PEAK INTENSITY; RESIDUAL CARBON; ROOT MEAN SQUARE; SOL-GEL SPIN COATING; SOL-GEL SPIN COATING METHOD; TEMPERATURE RANGE; XPS; XPS SPECTRA; XRD PATTERNS;

ANNEALING; BINDING ENERGY; CARBON FILMS; COATINGS; FILM PREPARATION; GELS; HYDROCHLORIC ACID; INDIUM; INDIUM COMPOUNDS; NANOSTRUCTURED MATERIALS; ORGANIC POLYMERS; PHOTOELECTRICITY; PHOTONS; SHEET RESISTANCE; SOL-GEL PROCESS; SOL-GELS; SOLS; SURFACE RESISTANCE; SURFACE ROUGHNESS; SURFACE TREATMENT; THIN FILMS; TIN; TIN OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

OXIDE FILMS;

EID: 78650226067     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2010.09.033     Document Type: Article

References (15)

1. P.K. Manoj, B. Joseph, V.K. Vaidyan, and D.S.D. Amma Preparation and characterization of indium-doped tin oxide thin films Ceram. Int. 33 2 2007 273 278
2. R. Pan, S. Qiang, K. Liew, Y. Zhao, R. Wang, and J. Zhu Effect of stabilizer on synthesis of indium tin oxide nanoparticles Powder Technol. 189 1 2009 126 129
3. Y.C. Liang Surface morphology and conductivity of zirconium-doped nanostructured indium oxide films with various crystallographic features Ceram. Int. 36 5 2010 1743 1747
4. O. Warschkow, D.E. Ellis, G.B. Gonzalez, and T.O. Mason Defect structures of tin-doped indium oxide J. Am. Ceram. Soc. 86 10 2003 1700 1706
5. M.J. Alam, and D.C. Cameron Investigation of annealing effects on sol-gel deposited indium tin oxide thin films in different atmospheres Thin Solid Films 420-421 2002 76 82
6. M. Quass, H. Steffen, R. Hippler, and H. Wulff Influence of microstructure on oxygen diffusion in plasma-deposited In/Sn films Thin Solid Films 420-421 2002 306 311
7. E.S. Raj, and K.L. Choy Microstructure and properties of indium tin oxide films produced by electrostatic spray assisted vapour deposition process Mater. Chem. Phys. 82 2 2003 489 492
8. G. Liu, J.B. Kerr, and S. Johnson Dark spot formation relative to ITO surface roughness for polyfluorene devices Synthetic Met. 144 1 2004 1 6
9. Y.S. Jung, D.W. Lee, and D.Y. Jeon Influence of dc magnetron sputtering parameters on surface morphology of indium tin oxide thin films Appl. Surf. Sci. 221 1-4 2004 136 142
10. C.J. Huang, Y.K. Su, and S.L. Wu The effect of solvent on the etching of ITO electrode Mater. Chem. Phys. 84 1 2004 146 150
11. J.A. Chaney, S.E. Koh, C.S. Dulcey, and P.E. Pehrsson Surface chemistry of carbon removal from indium tin oxide by base and plasma treatment, with implications on hydroxyl termination Appl. Surf. Sci. 218 1-4 2003 259 267
12. H. Tomonaga, and T. Morimoto Indium-tin oxide coatings via chemical solution deposition Thin Solid Films 392 2 2001 243 248
13. H.L. Ma, D.H. Zhang, P. Ma, S.Z. Win, and S.Y. Li Preparation and properties of transparent conducting indium tin oxide films deposited by reactive evaporation Thin Solid Films 263 1 1995 105 110
14. O. Warschkow, D.E. Ellis, G.B. Gonzalez, and T.O. Mason Defect cluster aggregation and nonreducibility in tin-doped indium oxide J. Am. Ceram. Soc. 86 10 2003 1707 1711
15. M.D. Stove, J. Touskova, and J. Tousek X-ray photoelectron spectroscopy, scanning electron microscopy and optical transmission studies of indium tin oxide and cadmium sulphide thin films for solar cells Thin Solid Films 299 1-2 1997 67 71