Influence of microstructure on oxygen diffusion in plasma-deposited In/Sn films

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 306-311

  Quaas, M ^a   Steffen, H ^a   Hippler, R ^a   Wulff, H ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

Grazing incidence X ray diffractometry; In Sn films; Microstructure; Oxygen diffusion

Indexed keywords

GRAIN BOUNDARIES; INDIUM; MAGNETRON SPUTTERING; METALLIC FILMS; MICROSTRUCTURE; PLASMA APPLICATIONS; TIN; X RAY DIFFRACTION ANALYSIS;

GRAIN BOUNDARY DIFFUSION;

THIN FILMS;

EID: 0037011365     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00855-6     Document Type: Conference Paper

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