Microstructure and properties of indium tin oxide films produced by electrostatic spray assisted vapour deposition process

Materials Chemistry and Physics

Volumn 82, Issue 2, 2003, Pages 489-492

  Raj, Edwin S ^a   Choy, K L ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Electrical properties; Indium tin oxide; Thin films; Vapour deposition

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; ELECTROSTATICS; GRAIN GROWTH; INDIUM COMPOUNDS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS;

THERMAL REFLECTORS;

THIN FILMS;

EID: 0042510684     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(03)00278-5     Document Type: Article

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