Dome-like and dense SiC-SiO2 nanocomposite films synthesized by laser chemical vapor deposition using CO2 laser

Surface and Coatings Technology

Volumn 205, Issue 8-9, 2011, Pages 2818-2822

  Yu, Shu ^a,b   Ito, Akihiko ^a   Tu, Rong ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b CENTRAL SOUTH UNIVERSITY   (China)

Author keywords

Laser CVD; Nanocomposite; SiC; SiO2

Indexed keywords

AMORPHOUS PHASE; CRYSTALLINE PHASE; DEPOSITION TEMPERATURES; HIGH TEMPERATURE; LASER CHEMICAL VAPOR DEPOSITION; LASER CVD; NANOCOMPOSITE FILM; SIC; SIC GRAINS; SIO2; TETRA-ETHYL-ORTHO-SILICATE; TOTAL PRESSURE;

ACETYLENE; AMORPHOUS FILMS; ASTATINE; CHEMICAL VAPOR DEPOSITION; DOMES; SILICON CARBIDE;

NANOCOMPOSITES;

EID: 78650225366     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.10.050     Document Type: Article

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