Synthesis and characterization of inorganic silicon oxycarbide glass thin films by reactive rf-magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 1, 2007, Pages 153-159

  Ryan, Joseph V ^a   Pantano, C G ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METASTABLE MATERIALS; RADIO-FREQUENCY REACTIVE SPUTTERING; SILICON OXYCARBIDE;

ELECTRON MICROSCOPY; GLASS; MAGNETRON SPUTTERING; POLYSILANES; SILICON COMPOUNDS; SYNTHESIS (CHEMICAL);

THIN FILMS;

EID: 33846229717     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2404688     Document Type: Article

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