Enhancement of crystallinity in ZnO:Al films using a two-step process involving the control of the oxygen pressure

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2010, Pages 3709-3712

  Moon, Taeho ^a   Yoon, Wonki ^a   Ji, Kwang Sun ^a   Ahn, Seh Won ^a   Joo, Minho ^a   Shin, Hui Youn ^a   Park, Kyuho ^a   Lee, Heon Min ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AFM IMAGE; COLUMNAR GROWTH; CRATER SIZES; CRYSTALLINITIES; ETCHED SURFACE; GRAIN STRUCTURES; HIGH OXYGEN PRESSURE; LATERAL GROWTH; LOCAL STRAINS; MORPHOLOGY CHANGES; NON-UNIFORM DISTRIBUTION; NONUNIFORM; NUCLEATION SITES; OXYGEN PRESSURE; PULSED MAGNETRON SPUTTERING; SEED LAYER; TWO-STEP PROCESS; ZNO:AL FILMS;

ASTATINE; CHEMICAL ATTACK; FILM PREPARATION; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; METALLIC FILMS; OXYGEN; PHOTOVOLTAIC EFFECTS; ZINC OXIDE;

PROCESS CONTROL;

EID: 78650163441     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2010.5617006     Document Type: Conference Paper

References (12)

1. 2+ Phosphors for Plasma Display Panels", Electrochem. Solid-State Lett. 12, J61 (2009).
2. J. Müller, B. Rech, J. Springer, and M. Vanecek, "TCO and Light Trapping in Silicon Thin Film Solar Cells", Solar Energy 77, 917 (2004).
3. 2 with High Haze Factors", Jpn. J. Appl. Phys. 41, 6417 (2002).
4. O. Kluth, G. Schöpe, J. Hüpkes, C. Agashe, J. Müller, and B. Rech, "Modified Thornton Model for Magnetron Sputtered Zinc Oxide: Film Structure and Etching Behaviour", Thin Solid Films 442, 80 (2003).
5. C. Agashe, O. Kluth, J. Hüpkes, U. Zastrow, B. Rech, and M. Wuttig, "Efforts to Improve Carrier Mobility in Radio Frequency Sputtered Aluminum Doped Zinc Oxide Films", J. Appl. Phys. 95, 1911 (2004).
6. T. Onuma, S. F. Chichibu, A. Uedono, Y.-Z. Yoo, T. Chikyow, T. Soda, M. Kawasaki, and H. Koinuma, "Reduced Defect Densities in the ZnO Epilayer Grown on Si Substrates by Laser-Assisted Molecular-Beam Epitaxy Using a ZnS Epitaxial Buffer Layer", Appl. Phys. Lett. 85, 5586 (2004).
7. 3 Buffer Layers", Appl. Phys. Lett. 92, 072101 (2008).
8. Y. Zhang, H. Zheng, J. Su, B. Lin, and Z. Fu, "Effects of SiC Buffer Layer on the Optical Properties of ZnO Films Grown on Si (111) Substrates", J. Lumin. 124, 252 (2007).
9. D.-W Kang, S.-H. Kuk, K.-S. Ji, S.-W. Ahn, and M.-K. Han, "Highly Transparent and High Haze ZnO:AI Film for Front TCO of a-Si:H and uc-Si:H Solar Cells by Controlling Oxygen Flow", Mater. Res. Soc. Symp. Proc. 1153, A07-19 (2009).
10. 3 Thin Films" Appl. Phys. Lett. 86, 182904 (2005).
11. 3+ Nanoparticles", J. Phys. Chem. C 111, 4164 (2007).
12. J. Owen, J. Hopkes, and E. Bunte, "Observation of the Evolution of Etch Features on Polycrystalline ZnO:AI Thin-Films", Mater. Res. Soc. Symp. Proc. 1153, A07-08 (2009).