Magnetic field effects on coating deposition rate and surface morphology coatings using magnetron sputtering

Smart Materials and Structures

Volumn 19, Issue 12, 2010, Pages

  Yang, Yu Sen ^a   Huang, Wesley ^a  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM NITRIDE; CHROMIUM NITRIDE COATINGS; CHROMIUM NITRIDE FILMS; COATING DEPOSITION; COLD WORK DIE; DIE AND MOLD; MAGNETIC ARRANGEMENTS; MAGNETIC FIELD CONFIGURATIONS; MAGNETRON SPUTTERING SYSTEMS; PROCESS PARAMETERS; SEM; SILICON (100); SUBSTRATE BIAS; UNBALANCED MAGNETRON; WEAR AND OXIDATION RESISTANCE;

CHROMIUM; CHROMIUM METALLOGRAPHY; DEPOSITION RATES; DIES; INORGANIC COATINGS; MAGNETIC FIELD EFFECTS; MAGNETISM; MAGNETRON SPUTTERING; MORPHOLOGY; NITRIDES; SUBSTRATES; WEAR RESISTANCE;

SURFACE MORPHOLOGY;

EID: 78649960587     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/19/12/124003     Document Type: Article

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