Effect of alumina doping on structural, electrical, and optical properties of sputtered ZnO thin films

Thin Solid Films

Volumn 515, Issue 3, 2006, Pages 872-875

  Bai, S N ^a   Tseng, T Y ^b  

^a CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Alumina doping; Electrical properties; Magnetron sputtering; Optical properties; Structural properties; Zinc oxide

Indexed keywords

DOPING (ADDITIVES); ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; THIN FILMS; ZINC OXIDE;

ALUMINA DOPING; FULL WIDTH AT HALF MAXIMUM (FWHM); INTERFERENCE FRINGES; STRUCTURAL PROPERTIES;

ALUMINA;

EID: 33750456209     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.07.048     Document Type: Article

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