Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor

Journal of Micromechanics and Microengineering

Volumn 20, Issue 12, 2010, Pages

  Haneveld, J ^a,b,c   Lammerink, T S J ^a,b   De Boer, M J ^a,b   Sanders, R G P ^a,b   Mehendale, A ^a,b   Lotters J C ^a,b,c   Dijkstra, M ^a,b   Wiegerink, R J ^a,b  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c Bronkhorst High Tech BV   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE READOUT; CAPACITOR ELECTRODE; COMB-SHAPED ELECTRODES; CORIOLIS; CORIOLIS FLOW; ETCHING METHOD; FLOW RANGES; FULL SCALE; LUMPED ELEMENT MODEL; MASS FLOW; MASS FLOW SENSORS; MAXIMUM PRESSURE; MEASUREMENT RESULTS; MICROMACHINED; MULTIPLE METALS; QUALITY FACTORS; SACRIFICIAL LAYER; SEMI-CIRCULAR CHANNELS; SENSOR PERFORMANCE; THIN LAYERS; VACUUM PACKAGING;

ARGON; ATMOSPHERIC MOVEMENTS; ATMOSPHERIC PRESSURE; DESIGN; ELECTRODES; ETHANOL; MASS TRANSFER; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; SILICON WAFERS;

SENSORS;

EID: 78649721090     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/125001     Document Type: Article

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