Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces

Optics Express

Volumn 18, Issue 24, 2010, Pages 25102-25107

  Wang, Taisheng ^a,b   Yu, Weixing ^a   Zhang, Dengying ^a,b   Li, Chunrong ^a   Zhang, Hongxin ^a   Xu, Wenbin ^a   Xu, Zhijun ^a   Liu, Hua ^a   Sun, Qiang ^a   Lu, Zhenwu ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (OPTICAL); DIFFRACTIVE OPTICAL ELEMENTS; GELS; GLASS; GLASS LASERS; LUMINESCENCE OF INORGANIC SOLIDS; OPTICAL TESTING; SILICON COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; SOLS; SURFACES; THREE DIMENSIONAL;

3-DIMENSIONAL; CIRCULAR GRATINGS; COMPLEX SURFACE; CONCAVE LENS; CURVED SURFACES; HYBRID SOL-GEL; LASER DIRECT WRITING; LITHOGRAPHIC FABRICATION; OPTICAL TEST; SOL-GEL GLASS; SURFACE RELIEFS; TIO;

FABRICATION;

EID: 78649712796     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.025102     Document Type: Article

References (16)

1. J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, "Measurement of a convex secondary mirror using a holographic test plat," L. M. Stepp, ed., Proc. SPIE 2199, 193-198 (1994).
2. T. Harada, S. Moriyama, and T. Kita, "Mechanically ruled stigmatic concave gratings," Jpn. J. Appl. Phys. 14, 175-179 (1974).
3. H. Liu, Z. Lu, F. Li, Y. Xie, S. Kan, and S. Wang, "Using curved hologram to test large-aperture convex surface," Opt. Express 12(14), 3251-3256 (2004).
4. M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, "Fabrication of continuous-relief microoptical elements by direct laser writing in photoresists," Opt. Eng. 33(11), 3556-3566 (1994).
5. R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, "Design and fabrication of topologically complex, three-dimensional microstructures," Science 280(5372), 2089-2091 (1998).
6. D. Radtke, M. Stumpf, and U. Zeitner, "Advances in lithography on non-planar surfaces," Proc. SPIE 7716, 77160Z, (2010).
7. P. Äyräs, J. T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, "Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp," Opt. Commun. 162(4-6), 215-218 (1999).
8. S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A. V. Tishchenko, and O. Parriaux, "Single-step UV recording of sinusoidal surface gratings in hybrid solgel glasses," Appl. Opt. 38(32), 6744-6748 (1999).
9. J. T. Rantala, N. Nordman, O. Nordman, J. Vähäkangas, S. Honkanen, and N. Peyghambarian, "Sol-gel hybrid glass diffractive elements by direct electron-beam exposure," Electron. Lett. 34(5), 455-456 (1998).
10. W. X. Yu, X.-C. Yuan, N. Q. Ngo, W. X. Que, W. C. Cheong, and V. Koudriachov, "Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing," Opt. Express 10(10), 443-448 (2002).
11. H. Jiang, X.-C. Yuan, Z. Yun, Y. C. Chan, and Y. L. Lam, "Fabrication of microlens in photosensitive hybrid solgel films using a gray scale mask," Mater. Sci. Eng. C 16(1-2), 99-102 (2001).
12. F. Zhao, Y. Xie, S. He, S. Fu, and Z. Lu, "Single step fabrication of microlens arrays with hybrid HfO2-SiO2 sol-gel glass on conventional lens surface," Opt. Express 13(15), 5846-5852 (2005).
13. Y. Xie, Z. Lu, F. Li, J. Zhao, and Z. Weng, "Lithographic fabrication of large diffractive optical elements on a concave lens surface," Opt. Express 10(20), 1043-1047 (2002).
14. Y. Xie, Z. Lu, and F. Li, "Fabrication of large diffractive optical elements in thick film on a concave lens surface," Opt. Express 11(9), 992-995 (2003).
15. W. Yu, and X.-C. Yuan, "Patternable hybrid sol-gel material cuts the cost of fabrication of microoptical elements for photonics applications," J. Mater. Chem. 14(5), 821-823 (2004).
16. T. D. Milster, and C. L. Vernold, "Technique for aligning optical and mechanical axes based on a rotating linear grating," Opt. Eng. 34(10), 2840-2844 (1995).