High-pressure peristaltic membrane micropump with temperature control

Journal of Microelectromechanical Systems

Volumn 19, Issue 6, 2010, Pages 1462-1469

  Svensson, Stefan ^a   Sharma, Gunjana ^a   Ogden, Sam ^a   Hjort, Klas ^a   Klintberg, Lena ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

High back pressure; integrated temperature sensor; paraffin actuator; peristaltic micropump; pressure independent flow; stainless steel membrane

Indexed keywords

ANALYTICAL SYSTEMS; BACK PRESSURES; CONSTANT FLOW RATES; DRIVING SCHEMES; DRIVING VOLTAGES; ENERGY EFFICIENT; FLOW CHARACTERISTIC; FOUR-PHASE; FUSION BONDING; HIGH BACK PRESSURE; HIGH PRESSURE; INTEGRATED TEMPERATURE SENSOR; MELTING AND SOLIDIFICATION; MICRO PUMP; PARYLENES; PERISTALTIC MICROPUMPS; ROBUST DESIGNS; SIX-PHASE; SOLID-TO-LIQUID PHASE; THERMALLY ACTIVATED; VOLUME EXPANSION;

ACTUATORS; ATMOSPHERIC PRESSURE; LIQUID CHROMATOGRAPHY; LIQUIDS; MEMBRANES; PARAFFIN WAXES; PARAFFINS; PHASE TRANSITIONS; STAINLESS STEEL; TEMPERATURE SENSORS;

PUMPS;

EID: 78649668257     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2076784     Document Type: Article

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