A planar compliance-based self-adaptive microfluid variable resistor

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 411-419

  Yang, Bozhi ^a   Lin, Qiao ^a,b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b Columbia University ^*  (United States)

Author keywords

Flow regulator; Fluid structure interaction (FSI); Fluidic resistor; Microfluidics; Valve

Indexed keywords

FLOW OF FLUIDS; FLOW RATE; FLUID STRUCTURE INTERACTION; MICROCHANNELS; POLYDIMETHYLSILOXANE; VALVES (MECHANICAL);

FLOW REGULATOR; FLUIDIC RESISTOR;

MICROFLUIDICS;

EID: 34147146491     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.892892     Document Type: Article

References (37)

1. G. T. A. Kovacs, Micromachined Transducers Sourcebook. Boston, MA: WCB/McGraw-Hill, 1998.
2. N. T. Nguyen and S. T. Wereley, Fundamentals and Applications of Microfluidics. Boston, MA: Artech House, 2002.
3. A. Emmer, M. Jansson, J. Roeraade, U. Lindberg, and B. Hök, "Fabrication and characterization of a silicon microvalve," J. Microcol. Separ., vol. 4, pp. 13-18, 1991.
4. D. C. S. Bien, S. J. N. Mitchell, and H. S. Gamble, "Fabrication and characterization of a micromachined passive valve," J. Micromech. Microeng., vol. 13, pp. 557-562, 2003.
5. M. Hu, H. Du, S. F. Ling, Y. Fu, Q. Chen, L. Chow, and B. Li, "A silicon-on-insulator based micro check valve," J. Micromech. Microeng., vol. 14, pp. 382-387, 2004.
6. X. Q. Wang, Q. Lin, and Y. C. Tai, "A Parylene micro check valve," in Proc. 12th IEEE Int. Workshop Micro Electro Mech. Syst. (MEMS '99) Orlando, FL, Jan. 17-21, 1999, pp. 177-182.
7. N. T. Nguyen, T. Q. Truong, K. K. Wong, S. S. Ho, and C. L. N. Low, "Micro check valves for integration into polymeric microfluidic devices," J. Micromech. Microeng., vol. 14, no. 14, pp. 69-75, 2004.
8. N. L. Jeon, D. T. Chiu, C. J. Wargo, H. K. Wu, I. S. Choi, J. R. Anderson, and G. M. Whitesides, "Microfluidics section: Design and fabrication of integrated passive valves and pumps for flexible polymer 3-Dimensional microfluidic systems," Biomed. Microdev., vol. 4, pp. 117-121, 2002.
9. D. Kim and D. J. Beebe, "In-situ fabricated micro check-valve utilizing the spring force of a hydrogel," in Proc. 7th Int. Conf. Micro Total Analysis Syst. (MicroTAS '03), Squaw Valley, CA, Oct. 5-9, 2003, pp. 947-950.
10. E. F. Hasselbrink, Jr, T. J. Shepodd, and J. E. Rehm, "High-pressure microfluidic control in lab-on-a-chip devices using mobile polymer monoliths," Anal. Chem., vol. 74, pp. 4913-4918, 2002.
11. V. Seidemann, S. Butefisch, and S. Buttgenbach, "Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers," Sens. Actuators A: Phys., vol. 97, no. 8, pp. 457-461, 2002.
12. M. L. Adams, M. L. Johnston, A. Scherer, and S. R. Quake, "Polydimethylsiloxane based microfluidic diode," J. Micromech. Microeng., vol. 15, pp. 1517-1521, 2005.
13. T. Goettsche, J. Kohnle, M. Willmann, H. Ernst, S. Messner, R. Steger, M. Storz, W. Lang, R. Zengerle, and H. Sandmaier, "Novel approaches to microfluidic components in high-end medical applications," in 12th Int. Conf. Solid State Sens., Actuators Microsyst. (Transducers '03), Boston, MA, Jun. 8-12, 2003, pp. 623-626.
14. M. W. v. Toory and T. S. J. Lammerinky, "A novel micromechanical flow controller," J. Micromech. Microeng., vol. 7, pp. 165-169, 1997.
15. K. Foster and G. A. Parker, Fluidics: Components and Circuits. New York: Wiley-Interscience, 1970.
16. B. Wang, T. J. Siahaan, and R. A. Soltero, Drug Delivery: Principles and Applications. Hoboken, NJ: Wiley, 2005.
17. S. Dewitt, "Microreactors for chemical synthesis," Current Opinion Chem. Biol., vol. 3, pp. 350-356, 1999.
18. M. Müller, "Science, medicine, and the future: Microdialysis," Clin. Rev., vol. 324, pp. 588-591, 2002.
19. S. Park, W. H. Ko, and J. M. Prahl, "A constant flow-rate microvalve actuator based on silicon and micromachining technology," in Tech. Dig. 1988 Solid-State Sens. Actuator Workshop (Hilton Head '88 , Hilton Head Island, SC, Jun. 6-9, 1988, pp. 136-139.
20. C. Amacker, Y. S. Leungki, V. Pasquier, C. Madore, M. Haller, and P. Renaud, "Passive micro-flow regulator for drug delivery system," in Proc. Eurosensors XII, Southampton, U.K., Sep. 13-16, 1998, pp. 591-594.
21. P. Coussear, R. Hirschi, B. Frehner, S. Gamper, and D. Maillefer, "Improved micro-flow regulator for drug delivery systems," in Proc. 14th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS '01), Interlaken, Switzerland, Jan. 21-25, 2001, pp. 527-530.
22. E. P. Kartalov, C. Walker, C. R. Taylor, W. F. Anderson, and A. Scherer, "Microfluidic vias enable nested bioarrays and autoregulatory devices in Newtonian fluids," Proc. Nat. Acad. Sci., vol. 103, pp. 12280-12284, 2006.
23. A. Groisman, M. Enzelberger, and S. R. Quake, "Microfluidic memory and control devices," Science, vol. 300, pp. 995-998, 2003.
24. A. Padmanabhan, C. Cabuz, E. Cabuz, J. Schwichtenberg, R. E. DeMers, and E. Satren, "MEMS-Based flow controller for flow cytometry," in Tech. Dig. 2002 Solid-State Sens., Actuator Microsyst. Workshop (Hilton Head '02), Hilton Head Island, SC, Jun. 2-6, 2002, pp. 110-111.
25. M. J. Mescher, C. E. Dub, M. Varghese, and J. O. Fiering, "Surface mount microfluidic flow regulator on a polymer substrate," in Proc. 7th Int. Conf. Micro Total Anal. Syst. (MicroTAS '03), Squaw Valley, CA, Oct. 5-9, 2003, pp. 947-950.
26. J. S. Fitch, A. K. Henning, E. B. Arkilic, and J. M. Harris, "Pressure-based mass-flow control using thermopneumatically-actuated microvalves," in Tech. Dig. 1998 Solid-State Sens. Actuator Workshop (Hilton Head '98), Hilton Head Island, SC, Jun. 7-11, 1998, pp. 162-165.
27. J. Xie, J. Shih, and Y. C. Tai, "Integrated surface-micromachined mass flow controller," in Proc. 16th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS '03), Kyoto, Japan, Jan. 19-23, 2003, pp. 20-23.
28. B. H. Jo, L. M. V. Lerberghe, J. N. Motsegood, and D. J. Beebe, "Three-dimensional micro-channel fabrication in poly-dimethylsiloxane (PDMS) elastomer," J. Microelectromech. Syst., vol. 9, pp. 76-81, 2000.
29. D. Armani, C. Liu, and N. Aluru, "Re-configurable fluid circuits by PDMS elastomer micromachining," in Proc. 12th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS '99), Orland, FL, Jan. 17-21, 1999, pp. 222-227.
30. E. Madenci and I. Guven, The Finite Element Method and Applications in Engineering Using ANSYS. New York: Springer-Verlag, 2005.
31. E. M. Arruda and M. C. Boyce, "A three-dimensional constitutive model for the large stretch behavior of rubber elastic materials," J. Mech. Phys. Solids, vol. 41, pp. 389-412, 1993.
32. C. W. Macosko, Rheology: Principles, Measurement and Applications. New York: VCH, 1994.
33. S. Timoshenko et al., Theory of Plates and Shells, 2nd ed. New York: McGraw-Hill, 1959.
34. A. W. Leissa, Vibration of Plates. Washington, D.C.: U.S. Government Printing Office, 1969.
35. B. Hamrock, Fundamentals of Fluid Film Lubrication. New York: McGraw-Hill, 1994.
36. Q. Lin, B. Yang, J. Xie, and Y. C. Tai, "Analysis of a surface-machined peristaltic pump," in Proc. 8th Int. Conf. Micro Total Anal. Syst. (MicroTAS '04), Malmo, Sweden, Sep. 26-30, 2004, pp. 611-613.
37. F. M. White, Fluid Mechanics, 5th ed. New York: McGraw-Hill, 2002.