Electrical and optical properties of deep ultraviolet transparent conductive Ga2O3/ITO films by magnetron sputtering

Journal of Semiconductors

Volumn 31, Issue 10, 2010, Pages

  Jianjun, Liu ^a   Jinliang, Yan ^a   Liang, Shi ^a   Ting, Li ^a  

^a LUDONG UNIVERSITY   (China)

Author keywords

Deep ultraviolet; Gallium oxide; Indium tin oxide; Transparent conductive film

Indexed keywords

BI-LAYER FILMS; DEEP ULTRAVIOLET; DOUBLE-BEAM; ELECTRICAL AND OPTICAL PROPERTIES; FOUR POINT PROBE; GALLIUM OXIDE; INDIUM TIN OXIDE; ITO FILMS; LAYER CONTROLS; LAYER THICKNESS; QUARTZ GLASS SUBSTRATES; SPECTRAL REGION; SPECTRAL SHAPES; TRANSPARENT CONDUCTIVE; TRANSPARENT CONDUCTIVE FILMS; ULTRAVIOLET TRANSMITTANCES;

CONDUCTIVE FILMS; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; GALLIUM; INDIUM; INDIUM COMPOUNDS; OPTICAL PROPERTIES; QUARTZ; SHEET RESISTANCE; SUBSTRATES; TIN; TIN OXIDES;

ITO GLASS;

EID: 78649418070     PISSN: 16744926     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-4926/31/10/103001     Document Type: Article

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