Ultrasensitive detection of infrared photon using microcantilever: Theoretical analysis

Chinese Physics Letters

Volumn 27, Issue 10, 2010, Pages

  Cao, L X ^a   Zhang, Feng Xin ^b,c   Zhu, Yin Fang ^b,c   Yang, Jin Ling ^b,c  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b INSTITUTE OF SEMICONDUCTORS   (China)

^c State Key Laboratory of Transducer Technology   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; PHOTODETECTORS; PHOTONS;

FAR INFRARED; INFRARED PHOTONS; MICRO-CANTILEVERS; MIDINFRARED; NEAR INFRARED; NEAR-INFRARED; PHOTON DETECTION; ULTRA-HIGH-SENSITIVITY; ULTRASENSITIVE DETECTION; VIBRATING MICROCANTILEVER;

INFRARED DEVICES;

EID: 78649389416     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/27/10/108501     Document Type: Article

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