Fabry-perot microcavity pressure sensor with a novel single deeply corrugated diaphragm

Microwave and Optical Technology Letters

Volumn 39, Issue 3, 2003, Pages 240-243

  Wang, W J ^a   Lin, R M ^a   Ren, Y ^a   Sun, T T ^a   Guo, D G ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Corrugated diaphragm; Fabry perot; Pressure sensor

Indexed keywords

COMPUTER SIMULATION; DIAPHRAGMS; FINITE ELEMENT METHOD; MICROMACHINING; MIRRORS; PRESSURE DROP; PRESSURE TRANSDUCERS;

FABRY-PEROT MICROCAVITY PRESSURE SENSOR; SIGNAL AVERAGING EFFECT; SINGLE DEEPLY CORRUGATED DIAPHRAGM;

OPTICAL SENSORS;

EID: 0141974094     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/mop.11180     Document Type: Article

References (8)

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