Performance-enhanced Fabry-Perot microcavity structure with a novel non-planar diaphragm

Microelectronic Engineering

Volumn 70, Issue 1, 2003, Pages 102-108

  Wang, W J ^a   Lin, R M ^a   Sun, T T ^a   Guo, D G ^a   Ren, Y ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Corrugated diaphragm; Fabry Perot; Pressure sensor

Indexed keywords

DIAPHRAGMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PRESSURE MEASUREMENT;

MICROCAVITY STRUCTURES;

MICROELECTRONIC PROCESSING;

EID: 0141754200     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00399-X     Document Type: Article

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