A single-chip diaphragm-type miniature Fabry-Perot pressure sensor with improved cross-sensitivity to temperature

Measurement Science and Technology

Volumn 15, Issue 5, 2004, Pages 905-910

  Wang, W J ^a   Guo, D G ^a   Lin, R M ^a   Wang, X W ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Corrugated diaphragm; Fabry Perot; MEMS; Pressure sensor; Temperature dependence

Indexed keywords

APPROXIMATION THEORY; DIAPHRAGMS; FABRY-PEROT INTERFEROMETERS; PRESSURE EFFECTS; SENSITIVITY ANALYSIS; STRESS ANALYSIS; THERMAL EFFECTS;

CROSS-SENSITIVITY; FILM THICKNESS; OPTICAL RESPONSE;

MEASUREMENT THEORY;

MEASUREMENT METHOD; PRESSURE MEASUREMENT; SENSOR;

EID: 2542420824     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/15/5/018     Document Type: Article

References (11)

1. Jerman J H, Clift D J and Mallinson S R 1991 A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support Sensors Actuators A 29 151-8
2. Kim Y and Neikirk D P 1995 Micromachined Fabry-Perot cavity pressure transducer IEEE Photonics Technol. Lett. 7 1471-3
3. Han J, Kim J Y, Kim T S and Kim J S 2000 Performance of Fabry-Perot microcavity structures with corrugated diaphragms Sensors Actuators A 79 162-72
4. Wang W J, Lin R M, Sun T T, Guo D G and Ren Y 2003 Performance-enhanced Fabry-Perot microcavity structure with a novel non-planar diaphragm Microelectron. Eng. 70 102-8
5. Han J 1999 Novel fabrication and characterization method of Fabry-Perot microcavity pressure sensors Sensors Actuators A 75 168-75
6. Spiering V L, Bouwstra S, Ruud M E and Spiering J 1993 On-chip decoupling zone for package-stress reduction Sensors Actuators A 39 149-156
7. Niordson F I 1985 Shell Theory (Amsterdam: North-Holland)
8. Aben H and Guillemet C 1993 Photoelasticity of Glass (Berlin: Springer)
9. Chen T C, Kuo J I, Lee W L and Lee C C 2001 Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters Japan. J. Appl. Phys. 40 4087-96
10. Sakaguchi S 1999 Temperature dependence of transmission characteristics of multilayer film narrow bandpass filters Japan. J. Appl. Phys. 38 6362-8
11. Abramowitz M and Stegun I A 1970 Handbook of Mathematical Functions (New York: Dover)