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Volumn 47, Issue 9 PART 2, 2008, Pages 7537-7540
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In-plane lattice strain evaluation in piezoelectric microcantilever by two-dimensional X-ray diffraction
a,b
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Author keywords
In plane strain; Pb(Zr,Ti)O3; Piezoelectric microcantilever; Transverse piezoelectric constant (d31); Two dimensional X ray diffraction (XRD2)
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Indexed keywords
CHEMICAL SENSORS;
COMPOSITE MICROMECHANICS;
DIFFRACTION;
LATTICE CONSTANTS;
LEAD;
LEAD ALLOYS;
PIEZOELECTRIC TRANSDUCERS;
PIEZOELECTRICITY;
SILICON;
SILICON COMPOUNDS;
STRAIN MEASUREMENT;
TWO DIMENSIONAL;
X RAY ANALYSIS;
X RAY DIFFRACTION;
X RAY DIFFRACTION ANALYSIS;
ZIRCONIUM;
ATOMIC FORCE MICROSCOPY;
IN-PLANE STRAIN;
PB(ZR,TI)O3;
PIEZOELECTRIC MICROCANTILEVER;
TRANSVERSE PIEZOELECTRIC CONSTANT (D31);
TWO-DIMENSIONAL X-RAY DIFFRACTION (XRD2);
TRANSVERSE PIEZOELECTRIC CONSTANT (D 31);
ELECTROMAGNETIC WAVES;
TWO DIMENSIONAL;
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EID: 55149099410
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.7537 Document Type: Article |
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Times cited : (12)
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References (15)
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