Novel MEMS-based thermometer with low power-consumption for health-monitoring network application

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6800, Issue , 2008, Pages

  Zhang, Y ^a   Ikehara, T ^a   Lu, J ^a   Kobayashi, T ^a   Ichiki, M ^a   Itoh, T ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Bimorph; Health monitoring network; MEMS; Thermometer

Indexed keywords

ANALOG TO DIGITAL CONVERSION; ELECTRIC POWER UTILIZATION; HEALTH CARE; MEMS; MICROFABRICATION;

HEALTH-MONITORING; SCANNING LASER MICROSCOPY; TRIPLE-BEAM BIMORPH;

THERMOMETERS;

EID: 41149138269     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.759296     Document Type: Conference Paper

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