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Volumn , Issue , 2010, Pages 71-73

Application of WLP with Barrier trench structure in precision screen printing technology by glass frit

Author keywords

Barrier trench; Glass frit; Hermetic package; MEMS; Screen printing; WLP

Indexed keywords

BARRIER TRENCH; BONDING FORCES; GLASS FRIT; HERMETIC PACKAGES; HERMETIC SEALING; IMPROVED TECHNOLOGY; IN-PROCESS; LEAK TESTS; MECHANICAL SYSTEMS; MEMSDEVICES; NONUNIFORM; PROCESS YIELD; SCREEN PRINTING TECHNOLOGY; SHEAR TESTS; WAFER-LEVEL ENCAPSULATION; WATER TESTS; WLP;

EID: 78449287570     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEPT.2010.5582363     Document Type: Conference Paper
Times cited : (4)

References (9)
  • 1
    • 0033718159 scopus 로고    scopus 로고
    • The indent reflow sealing(IRS) technique-A method for the Fabrication of sealed cavities for MEMS devices
    • Harrie A C Tilmans,Myriam D J Van de Peer,Eric Beyne.The indent reflow sealing(IRS) technique-A method for the Fabrication of sealed cavities for MEMS devices.Journal of Microelectromechanical Systems,Vol. 9, No. 2 (2000), pp. 206-217.
    • (2000) Journal of Microelectromechanical Systems , vol.9 , Issue.2 , pp. 206-217
    • Tilmans, H.A.C.1    Van De Peer, M.D.J.2    Beyne, E.3
  • 4
    • 30344444791 scopus 로고    scopus 로고
    • Glass frit bonding-n universal technology for wafer level encapsulation and packaging
    • Roy Knechtel.Glass frit bonding-n universal technology for wafer level encapsulation and packaging.Microsystem Technologies,Vol. 12, No. 1-2 (2005), pp.63-68.
    • (2005) Microsystem Technologies , vol.12 , Issue.1-2 , pp. 63-68
    • Knechtel, R.1
  • 6
    • 0942277273 scopus 로고    scopus 로고
    • Selective bonding and encapsulation for wafer-level vacuum packaging of MEMS and related micro systems
    • Yi Tao, Ajay P.Malshe, William D.Brown. Selective bonding and encapsulation for wafer-level vacuum packaging of MEMS and related micro systems. Micro electronics Reliability,Vol.44,(2004),pp.251-258.
    • (2004) Micro Electronics Reliability , vol.44 , pp. 251-258
    • Tao, Y.1    Malshe, A.P.2    Brown, W.D.3
  • 8
    • 78449272507 scopus 로고    scopus 로고
    • MIL-STD-833E,method 2019.5
    • MIL-STD-833E,method 2019.5.
  • 9
    • 78449298270 scopus 로고    scopus 로고
    • MIL-STD-833E,method 1014.9
    • MIL-STD-833E,method 1014.9.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.