Analysis of multifunctional oxycarbide and oxynitride thin films by modulated IR radiometry

Journal of Physics D: Applied Physics

Volumn 43, Issue 39, 2010, Pages

  Gibkes, J ^a,b   Vaz, F ^c   Fernandes, A C ^c   Carvalho, P ^c   Macedo, F ^c   Faria Jr , R T ^c,d   Kijamnajsuk, P ^b,e   Pelzl, J ^b   Bein, B K ^b  

^a Georg Agricola University of Applied Sciences   (Germany)

^b RUHR UNIVERSITY BOCHUM   (Germany)

^c UNIVERSITY OF MINHO   (Portugal)

^d UNIVERSIDADE ESTADUAL DO NORTE FLUMINENSE DARCY RIBEIRO   (Brazil)

^e KASETSART UNIVERSITY   (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

COATING THICKNESS; COATING-SUBSTRATE SYSTEMS; DEPOSITION CONDITIONS; DEPOSITION PROCESS; DESTRUCTIVE MEASUREMENTS; ERROR LIMITS; INVERSE SOLUTION; MEASURED DATA; MODULATED IR RADIOMETRIES; MODULATED LASERS; MODULATION FREQUENCIES; MULTIFUNCTIONAL COATINGS; NON DESTRUCTIVE; NON-CONTACT; NON-DESTRUCTIVE MEASUREMENT; OXYCARBIDES; OXYNITRIDES; PHYSICAL VAPOUR DEPOSITION; QUANTITATIVE INTERPRETATION; SURFACE HEATING; THERMAL TRANSPORT PROPERTIES; THERMAL WAVE; TIME-DEPENDENT; TWO-LAYER THERMAL WAVE PROBLEM;

HEATING; MEASUREMENT THEORY; NITRIDES; RADIOMETERS; RADIOMETRY; THICKNESS MEASUREMENT; THIN FILMS; TOOL STEEL; TRANSITION METALS; TRANSPORT PROPERTIES;

COATINGS;

EID: 78249284013     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/39/395301     Document Type: Article

References (23)

1. Toth E L 1971 Transition Metal Carbides and Nitrides (New York: Academic)
2. Allcock B W and Lavin P A 2003 Novel composite coating technology in primary and conversion industry applications Surf. Coat. Technol. 163-164 62-6
3. y thin films J. Appl. Phys. 98 023715
4. Carvalho P, Chappé J M, Cunha L, Lanceros-Méndez S, Alpuim P, Vaz F, Alves E, Rousselot C, Espinós J P and González-Elipe A R 2008 Influence of the chemical and electronic structure on the electrical behavior of zirconium oxynitride films J. Appl. Phys. 103 104907
5. CALOTEST® equipment, CSM Instruments, Switzerland
6. Orth Th, Fluegge W and Gibkes J 2006 Characterisation of organic thin film coatings on automobile steel sheets by photothermal methods 9th European Conf. on NDT (Berlin, Germany, 25-29 September 2006)
7. Bolte J, Gu J H and Bein B K 1997 Background fluctuation limit of IR detection of thermal waves at high temperatures High Temp.-High Pressures 29 567-80
8. Macedo F, Ferreira J, Vaz F, Rebouta L, Haj Daoud A, Dietzel D and Bein B K 1999 Photothermal characterization of sputtered thin films and substrate treatment Photoacoustic & Photothermal Phenomena ed F Scudieri and M Bertolotti AIP Conf. Proc. 463 pp 342-4
9. Bennett C A and Patty R R 1982 Thermal wave interferometry: a potential application of the photoacoustic effect Appl. Opt. 21 49-54
10. Macedo F, Vaz F, Rebouta L, Carvalho P, Haj-Daoud A, Junge K H, Pelzl J and Bein B K 2008 Modulated IR radiometry of (TiSi) N thin films Vacuum 82 1457-60
11. Walther H G 2002 Surface roughness influence on photothermal radiometry Appl. Surf. Sci. 193 156
12. Nzodoum Fotsing J L, Bein B K and Pelzl J 2004 Potentialities of photothermal displacement experiments in micro-scaled systems Superlatt. Microstruct. 35 419-35
13. Nzodoum Fotsing J L, Gibkes J, Pelzl J and Bein B K 2005 Extremum method: inverse solution of the two-layer thermal wave problem J. Appl. Phys. 98 063522
14. Nzodoum Fotsing J L 2008 Friction wear of coatings analyzed by means of thermal wave excitation and modulated IR radiometry Wear 264 119-130 (Publ. online Wear 25.4.2007)
15. Carslaw H S and Jaeger J C 1984 Conduction of Heat in Solids (London: Oxford University Press)
16. Bein B K and Pelzl J 1989 Analysis of surfaces exposed to plasmas by nondestructive photoacoustic and photothermal techniques Plasma Diagnostics, vol 2, Surface Analysis and Interactions (ed O Auciello and D L Flamm) (New York: Academic) pp 211-326
17. Müller E R, Bein B K and Steinmetz K 1984 Time and space-resolved energy flux measurements in the divertor of the ASDEX Tokamak by computerized IR thermography Report IPP III/97, Max-Planck-Institut für Plasmaphysik, Garching, Germany
18. Würz H, Bein B K, Neuhauser J and Zasche D 1989 Power flow to the ASDEX divertor plates Fusion Technology 1988 vol 1, ed A M van Ingen et al (Amsterdam: North-Holland) pp 867-73
19. Macedo F, Carvalho P, Cunha L, Vaz F, Gibkes J, Bein B K and Pelzl J 2009 The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films Plasma Process. Polym. 6 S760-6
20. Chirtoc M et al 2001 Comparative study of coating thickness determination in packaging composite materials using photothermal radiometry, photoacoustic and photopyroelectric methods Anal. Sci. 17 s185-8
21. Cunningham M E and Peddicord K L 1981 Heat conduction in spheres packed in an infinite regular cubical array Int. Heat Mass Transfer 24 1081-8
22. Macedo F, Vaz F, Fernandes A C, Nzodoum-Fotsing J L, Gibkes J, Pelzl J and Bein B K 2009 Thickness control of coatings by means of modulated IR radiometry Plasma Process. Polym. 6 S592-8
23. Nicolai A and Börner P 1987 Minimization of the tritium content within the first wall of a tokamak reactor Fusion Technol. 12 119-36