Mechanical response of surface-micromachined beams exposed to short-pulse laser irradiation

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn , Issue , 2002, Pages 333-337

  Rogers, James W ^a,b   Phinney, Leslie M ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b MURRAY STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; CAMERAS; CCD CAMERAS; IMAGING SYSTEMS; INTERFEROMETRY; IRRADIATION; LASER HEATING; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REAL TIME SYSTEMS; THERMAL EXPANSION;

DIFFERENTIAL THERMAL EXPANSION; HIGH-SPEED CCD; INTERFEROMETRIC IMAGING SYSTEM; LASER IRRADIATIONS; MECHANICAL RESPONSE; MEMS-STRUCTURE; MEMSDEVICES; MICRO-CANTILEVERS; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED BEAMS; REALTIME IMAGING; SHORT-PULSE LASERS; SUBSEQUENT COOLING; TEMPERATURE DIFFERENCES; TIME-SCALES; TRANSPORT PROCESS;

COMPOSITE MICROMECHANICS;

EID: 78249272719     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-39334     Document Type: Conference Paper

References (9)

1. Zhao, Y., Mao, M., and Majumdar, A., 1999, "Application of Fourier Optics for Detecting Deflections of Infrared-Sensing Microcantilever Arrays", Microscale Thermophysical Engineering, 3, pp. 245-251. (Pubitemid 129343288)
2. Chen, S. C., Cahill, D. G., and Grigoropoulos, C. P., 2000, "Melting and Surface Deformation in Pulsed Laser Surface Micromodification of Ni-P Disks", Journal of Heat Transfer, 122, pp. 107-112.
3. Maboudian, R. and Howe, R. T., 1997, "Critical Review: Adhesion in Surface Micromechanical Structures," Journal of Vacuum Science Technology B, 15, pp. 1-20.
4. Tien, N. C., Jeong, S., Phinney, L. M., Fushinobu, K., and Bokor, J., 1996, "Surface Adhesion Reduction in Silicon Microstructures using Femtosecond Laser Pulses," Applied Physics Letters, 68, pp. 197-199.
5. Rogers, J. W. and Phinney, L. M., 2002, "Nanosecond Laser Repair of Adhered MEMS Structures," Journal of Heat Transfer, 124, pp. 394-396.
6. Rogers, J. W. and Phinney, L. M, 2001, "Process Yields for Laser Repair of Aged, Stiction-Failed, MEMS Devices", Journal of Microelectromechanical Systems, 10, pp. 280-285.
7. Phinney, L. M., and Rogers, J. W., 2002, "Pulsed Laser Repair of Adhered, Surface-Micromachined, Polycrystalline Silicon Cantilevers," Journal of Adhesion Science and Technology, in press.
8. Rogers, J. W., Mackin, T. J., and Phinney, L. M., 2002, "A Thermomechanical Model for Adhesion Reduction of MEMS Cantilevers," Journal of Microelectromechanical Systems, in press.
9. Rogers, J. W. and Phinney, L. M., 2002, "Interferometric Imaging System for Measuring Out-of-Plane Deflection in MEMS Devices," to be presented at the 2002 International Heat Transfer Conference, Grenoble, France.