Surface adhesion reduction in silicon microstructures using femtosecond laser pulses

Applied Physics Letters

Volumn , Issue , 1995, Pages 197-

  Tien, N C ^a   Jeong, S ^b   Phinney, L M ^b   Fushinobu, K ^b   Bokor, J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21844435299     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)