MEMS design rule checking: A batch approach for remote operation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3328, Issue , 1998, Pages 32-39

  Yarberry, Victor R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

AutoCAD; Design rule check; DRC; DXF; MEMS

Indexed keywords

CONCRETE BRIDGES; DESIGN; EMBEDDED SYSTEMS; GRAPHICAL USER INTERFACES; INTELLIGENT STRUCTURES; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL RESOLVING POWER; WINDOWS; WINDOWS OPERATING SYSTEM;

AUTOCAD; DESIGN RULE CHECK; DRC; DXF; DXF FORMAT; IC-LAYOUT; INTERFACE SOFTWARES; LAYOUT DESIGNS; MEMS DESIGN; MENTOR GRAPHICS (CO); MICRO ELECTROMECHANICAL STRUCTURES; ORIGINAL DESIGN; REMOTE OPERATIONS; REMOTE PROCESSING; WINDOW AREA; WINDOWS NT (FAMILY);

SOFTWARE DESIGN;

EID: 0242665125     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.320190     Document Type: Conference Paper

References (4)

1. AutoDesk Inc., "AutoCAD Release 13 Customization Guide", September, 1994.
2. Artwork Conversion Software, Inc., "ASM3500 DXF to GDSII Bidirectional Translator", August, 1992.
3. Mentor Graphics Corporation, ICverify Manual, 1994.
4. C. C. Barron, B. R. Davies, J. J. Sniegowski, M. S. Rodgers, J. H. Comtois, and M. A. Michalicek, "SAMPLE (Sandia Agile MEMS Prototyping , Layout tools, and Education)," SPIE Vol. 3223, pp. 10-16.