A 3D geometry modeler for the SUMMIT V MEMS designer

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 594-597

  Jorgensen, Craig Reed ^a   Yarberry, Victor R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

3D Modeling; MEMS; Solid modeling; SUMMiT V

Indexed keywords

CONFORMAL DEPOSITION; SOLID MODELING; WET ETCHING;

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DRY ETCHING; MATHEMATICAL MODELS; MICROMACHINING; POLYSILICON; THICKNESS MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0012072965     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. nd International Conference on Engineering Design and Automation, 1998.
2. ACIS by Spatial Corporation, http://www.spatial.com.
3. AutoCAD by Autodesk, http://www.autocad.com.