A 2D visualization tool for SUMMiT V designs

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 606-609

  Yarberry, V ^a   Jorgensen, C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Cross section; MEMS; Process simulation; SUMMiT

Indexed keywords

APPROXIMATION THEORY; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; GRAPHIC METHODS; MATHEMATICAL MODELS; PRODUCT DESIGN; USER INTERFACES;

HIERARCHICAL GEOMETRY; PROCESS DEFINITION FILE (PDF); PROCESS SIMULATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0012070722     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. nd International Conference on Engineering Design and Automation, 1998.
2. V.R. Yarberry, "MEMS Design Rule Checking: a batch approach for remote operation", SPIE 3328, 32-39, 1998.