Building a 'design-to-analysis' interface for SUMMiT™-Based microsystem development

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 3, Issue , 2001, Pages 233-240

  Wong, C Channy ^a   Jorgensen, Craig R ^a   Yarberry, Victor R ^a   Ho, Pauline ^a   Pawlowski, Roger P ^a   Freymiller, James ^a   Melander, Darryl J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

CAD; MEMS; Microsystem; Modeling Simulation; Prototyping; Surface Micromachining

Indexed keywords

MEMS; MICROSYSTEMS; MODELING AND SIMULATION; PROTOTYPING; SURFACE MICROMACHINING;

CHEMICAL VAPOR DEPOSITION; COMPUTATIONAL FLUID DYNAMICS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; MICROMACHINING; SURFACE TREATMENT; THIN FILMS; VIRTUAL REALITY;

MICROELECTROMECHANICAL DEVICES;

EID: 1542642486     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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